Publications

Khalil Najafi/Publications

Journal Publications

  1. Y. Tang, and K. Najafi. “Thick High Aspect-Ratio Biomimetic Silicon Hair Sensors as Accelerometers.” Journal of Microelectromechanical Systems 28, no. 1, pp. 131-142, 2019
  2. Y. Tang, A. Sandoughsaz, K.J. Owen, K. Najafi, “Ultra Deep Reactive Ion Etching of High Aspect-Ratio and Thick Silicon Using a Ramped-Parameter Process,” Journal of Microelectromechanical Systems, Vo. 27(4), pp. 686-697, 06/2018
  3. Y. Chen, E.E. Aktakka, J-K. Woo, K. Najafi, K.R. Oldham, “On-Chip Capacitive Sensing and Tilting Motion Estimation of a Micro-Stage for in situ MEMS Gyroscope Calibration,” Mechatronics, online 02/2018
  4. A. Darvishian, T. Nagourney, J.Y. Cho, B. Shiari, K. Najafi, “Thermoelastic Dissipation in Micromachined Birdbath Shell Resonators,” Journal of Microelectromechanical Systems, Vol. 26(4), pp. 758-772, 08/2017
  5. B. Shiari, T. Nagourney, A. Darvishian, J.Y. Cho, K. Najafi, “Simulation of Blowtorch Reflow of Fused Silica Micro-Shell Resonators,” Journal of Microelectromechanical Systems, Vol. 26(4), pp. 782-792, 08/2017
  6. D. Yang, J-K. Woo, S. Lee, J. Mitchell, A.D. Challoner, K. Najafi, “A Micro Oven-Control System for Inertial Sensors,” Journal of Microelectromechanical Systems, Vol. 26(3), pp. 507-518, 06/2017
  7. J. Cornett, B. Chen, S. Haidar, H. Berney, P. McGuinness, B. Lane, Y. Gao, Y. He, N. Sun, M. Dunham, M. Asheghi, K. Goodson, Y. Yuan, K. Najafi, “Fabrication and Characterization of Bi2Te3-Based Chip-Scale Thermoelectric Energy Harvesting Devices,” Journal of Electronic Materials, Vo. 46(5), pp. 2844-2846, 05/2017
  8. A. Darvishian, B. Shiari, J.Y. Cho, T. Nagourney, K. Najafi, “Anchor Loss in Hemispherical Shell Resonators,” Journal of Microelectromechanical Systems, Vol. 26(1), pp. 51-66, 02/2017
  9. J. Cornett, B. Chen, S. Haidar, H. Berney, P. McGuinness, B. Lane, Y. Gao, Y. He, N. Sun, M. Dunham, M. Asheghi, K. Goodson, Y. Yuan, K. Najafi, “Fabrication and Characterization of Bi2Te3-Based Chip-Scale Thermoelectric Energy Harvesting Devices,” Journal of Electronic Materials, pp. 1-3, 10/2016
  10. M. Sadeghi, H. S. Kim, R. L. Peterson, K. Najafi, “Electrostatic Micro-Hydraulic Systems,” Journal of Microelectromechanical Systems, Vol. 25(3), pp. 557-569, 06/2016
  11. E. E. Aktakka, J.-K. Woo, D. Egert, R. Gordenker, K. Najafi, “A Microactuation and Sensing Platform with Active Lockdown for In Situ Calibration of Scale Factor Drifts in Dual-Axis Gyroscopes,” IEEE/ASME Transactions on Mechatronics, Vol. 20, pp. 934-943, 04/2015
  12. H. Kim, A.A. Astle, L. Bernal, P. Washabaugh, K. Najafi , “An integrated electrostatic peristaltic 18-stage gas micropump with active microvalves,” Journal of Microelectromechanical Systems, Vol. 24, Iss. 1, pp. 192-206, 02/2015
  13. E. E. Aktakka and K. Najafi, “A Micro Inertial Energy Harvesting Platform with Self-Supplied Power Management Circuit for Autonomous Wireless Sensor Nodes,” IEEE Journal of Solid-State Circuits, Vol. 49, pp. 2017-2029, 09/2014
  14. J. McCullagh, R. Peterson, T. Galchev, R. Gordenker, Y. Zhang, J. Lynch and K. Najafi, “Long-term Testing of a Vibration Harvesting System for the Structural Health Monitoring of Bridges,” Sensors and Actuators A: Physical, Vol. 217, pp. 139-150, 07/2014
  15. H. Kim, A. A. Astle, K. Najafi, L. P. Bernal and P. D. Washabaugh, “An Integrated Electrostatic Peristaltic 18-Stage Gas Micropump With Active Microvalves,” Journal of Microelectromechanical Systems, Vol. PP, Iss. 99, 06/2014
  16. E. E. Aktakka, R. L. Peterson, K. Najafi, “High Stroke and High Deflection Bulk-PZT Diaphragm and Cantilever Micro Actuators and Effect of Pre-Stress on Device Performance,” Journal of Microelectromechanical Systems, Vol. 23, pp. 438-451, 04/2014
  17. J. Cho, J.-K. Woo, J. Yan, R. L. Peterson, K. Najafi, “Fused Silica Micro Birdbath Resonator Gyroscope,” Journal of Microelectromechanical Systems, Vol. 23, pp. 66-77, 02/2014
  18. A. Borna and K. Najafi, “A Low Power Light Weight Wireless Multichannel Microsystem for Reliable Neural Recording,” IEEE Journal of Solid-State Circuits, Vol. 49, pp. 439-451, 02/2014
  19. I. Shahosseini and K. Najafi, “Mechanical Amplifier for Translational Kinetic Energy Harvesters,” Journal of Physics: Conference Series, Vol. 557, 01/2014
  20. J. Cho, J. Yan, J. A. Gregory, H. Eberhart, R. L. Peterson, and K. Najafi, “3-Dimensional Blow Torch-Molding of Fused Silica Microstructures,” IEEE Journal of Microelectromechanical Systems, vol. 22, no. 6, pp. 1276-1284, 12/2013
  21. M. Sadeghi, R. L. Peterson, K. Najafi, “Air Flow Sensing Using Microwire Bonded Hair-Like Hot-Wire Anemometry,” Journal of Micromechanics and Microengineering, Vol. 23, No. 8, 085017, 08/2013
  22. E. E. Aktakka, R. L. Peterson, K. Najafi, “Wafer-Level Integration of High-Quality Bulk Piezoelectric Ceramics on Silicon,” IEEE Transactions of Electron Devices (TED), Vol. 60, pp. 2022-2030, 06/2013
  23. T. Galchev, E. E. Aktakka, K. Najafi, “A Piezoelectric Parametric Frequency Increased Generator for Harvesting Low-Frequency Vibrations,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), vol. 21(6), pp. 1311-1320, 12/2012
  24. S. W. Yoon, S. Lee, K. Najafi, “Vibration-Induced errors in MEMS Tuning Fork Gyroscopes,” Sensors and Actuators A: Physical, vol. 180, pp. 32-44, 06/2012
  25. S. W. Yoon, S. Lee, K. Najafi, “Vibration Sensitivity Analysis of MEMS Vibratory Ring Gyroscopes,” Sensors and Actuators A: Physical, vol. 171, no.2, pp. 163-177, 11/2011
  26. T V Galchev, J McCullagh, R L Peterson and K Najafi, “Harvesting traffic-induced vibrations for structural health monitoring of bridges,” Journal of Micromechanics and Microengineering, 21, 104005, 10/2011
  27. A. J. Gross, G. S. Hwang, B. Huang, H. Yang, N. Ghafouri, H. Kim, R. L. Peterson, C. Uher, M. Kaviany, K. Najafi, “Multistage Planar Thermoelectric Microcoolers,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), vol. 20, no. 5, pp. 1201-1210, 10/2011
  28. E. E. Aktakka, H. Kim, K. Najafi, “Energy Scavenging From Insect Flight,” Journal of Micromechanics and Microengineering, Vol. 21, No. 095016, 08/2011
  29. S. W. Yoon, S. Lee, N. C. Perkins, K. Najafi, “Shock Protection Improvement Using Integrated Novel Shock Protection Technologies,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), vol. 20, no. 4, pp. 1016-1031, 08/2011
  30. T. Galchev, H. Kim, K. Najafi, “Micro Power Generator for Harvesting Low-Frequency and Nonperiodic Vibrations,” IEEE/ASME Journal of Microelectromechanical Systems, (JMEMS), pp. 852-866, 08/2011
  31. T. V. Galchev, W.C. Welch III, K. Najafi, “A new low-temperature high-aspect-ratio MEMS process using plasma activated wafer bonding,” Journal of Micromechanics and Microengineering, v 21, n 4, 04/2011
  32. S.W. Yoon, S. Lee, N.C. Perkins, K. Najafi, “Analysis and wafer-level design of a high-order silicon vibration isolator for resonating MEMS devices,” Journal of Micromechanics and Microengineering, Vol. 21, No. 1, 015017, 01/2011
  33. H. Kim, K. Najafi, and L.P. Bernal, “Helmholtz Resonance Based Micro Electrostatic Actuators for Compressible Gas Control: a Microjet Generator and a Gas Micro Pump,” Journal of Microelectronics and Electronic Packaging, Vol. 7, No. 1, pp. 1-9, 01/2010
  34. K.D. Wise, G.E. Perlin, Y. Yao, K. Najafi, A.M. Sodagar, “An Implantable 64-Channel Wireless Microsystem for Single-Unit Neural Recording,” IEEE Journal of Solid-State Circuits, Vol. 44, Issue 9, pp. 2591 – 2604, 09/2009
  35. G.S. Hwang, A.J. Gross, H. Kim, S.W. Lee, N. Ghafouri, B.L. Huang, C. Lawrence, C. Uher, K. Najafi, M. Kaviany, “Micro thermoelectric cooler: Planar multistage,” International Journal of Mass and Heat Transfer, 52, Issues 7-8, pp. 1843–1852, 03/2009
  36. Baoling Huang, Chris Lawrence, Andrew Gross, Gi-Suk Hwang, Niloufar Ghafouri, Sang-Woo Lee, Hanseup Kim, Chang-Peng Li, Ctirad Uher, Khalil Najafi, and Massoud Kaviany, “Low-temperature characterization and micropatterning of coevaporated Bi2Te3 and Sb2Te3 films,” J. Applied Physics , 104, Issue 11, 113710-pp. 0-8, 12/2008
  37. K. D. Wise, A. M. Sodagar, Y. Yao, M. N. Gulari, G. E. Perlin, and K. Najafi, “Microelectrodes, Microelectronics, and Implantable Neural Microsystems,” Proc. IEEE, Special Issue on Implantable Biomimetic Microelectronic Systems, pp. 1184-1202, 07/2008
  38. K.D. Wise, A.M. Sodagar, Y. Yao; M.N. Gulari, G.E. Perlin, K. Najafi, “Microelectrodes, Microelectronics, and Implantable Neural Microsystems,” Proceedings of the IEEE, Vol. 96, Issue 7, pp. 1184 – 1202, 07/2008
  39. H. Kulah, and K. Najafi, “Energy Scavenging from Low Frequency Vibrations By Using Frequency Up Conversion for Wireless Sensor Applications,” IEEE J. Sensors, Vol. 8, No. 3, pp. 261-268, 03/2008
  40. K. King, S.W. Yoon, N.C. Perkins, and K. Najafi, “Wireless MEMS inertial System for Golf Swing Dynamics,” Sensors and Actuators A: Physical, Vol. 141, Issue 2, pp. 619-630, 02/2008
  41. J. Chae, J.M. Giachino, K. Najafi, “Fabrication and Characterization of a Wafer-Level MEMS Vacuum Package With Vertical Feedthroughs,” IEEE J. of Microelectromechanical Systems (JMEMS), Vol. 17, Issue 1, pp. 193-200, 02/2008
  42. J. Mitchell, G.R. Lahiji, K. Najafi, “An Improved Performance Poly-Si Pirani Vacuum Gauge Using Heat-Distributing Structural Supports,” IEEE J. Microelectromechanical Systems (JMEMS), Vol. 17, Issue 1, pp. 93-102, 02/2008
  43. H. Kim, and K. Najafi, “Characterization of Aligned Wafer-Level Transfer of Thin and Flexible Parylene Membranes,” IEEE /ASME J. of Microelectromechanical Systems (JMEMS), Vol. 16, No. 6, pp. 1386 – 1396, 12/2007
  44. M. Ghovanloo, and K. Najafi, “A Wireless Implantable Multicahnnel Microstimulating System-on-a-Chip with Modular Architecture,” IEEE Transactions on Neural Systems and Rehabilitation Engineering, Vol. 15, No. 3, pp. 449-457, 09/2007
  45. A. M. Sodagar, K. D. Wise, K. Najafi, “A Fully-Integrated Mixed-Signal Neural Processor for Implantable Multi-Channel Cortical Recording,” IEEE Transactions on Biomedical Engineering, Vol. 54, Issue 6, Part 1, pp. 1075-1088, 06/2007
  46. A. Astle, H. Kim, L. Bernal, K. Najafi, and P. Washabaugh, “Theoretical and experimental performance of a high frequency gas micropump,” Sensors and Actuators A: Physical, Vol. 134, Issue 1, pp. 245-256, 02/2007
  47. S. W. Yoon, N. Yazdi, N. C. Perkins, K. Najafi, “Micromachined Integrated Shock Protection for MEMS,” Sensors and Actuators A: Physical, Vol. 130-131, pp. 166-175, 08/2006
  48. B. H. Stark and K. Najafi, “A Mold and Transfer Process for Lead-Free Fluxless Soldering and Application to MEMS Packaging,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 15, No. 4, pp. 849-858, 08/2006
  49. A. M. Sodagar, K. Najafi, “Extremely-Wide-Range Supply-Independent CMOS Voltage References for Telemetry-Powering Applications,” Journal for Analog Integrated Circuits and Signal Processing, An International Journal, Kluwer Academic Publishers, 46, pp. 253-261, 03/2006
  50. H. Kulah, J. Chae, N. Yazdi and K. Najafi, “Noise Analysis and Characterization of a Sigma-Delta Capacitive Microaccelerometer,” IEEE Journal of Solid-State Circuits, Vol. 41, No. 2, pp. 352-361, 02/2006
  51. H. Kim, and K. Najafi, “Characterization of Low-Temperature Wafer Bonding Using Thin Film Parylene,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 14, No. 6, pp. 1347-1355, 12/2005
  52. J. Chae, B.H. Stark, and K. Najafi, “A micromachined Pirani gauge with dual heat sinks,” IEEE Transactions on Advanced Packaging (IEEE Transactions on Components, Packaging and Manufacturing Technology, Part B: Advanced Packaging), Vol. 28, Issue 4, pp. 619-625, 11/2005
  53. W.C. Welch, III, J. Chae, and K. Najafi, “Transfer of metal MEMS packages using a wafer-level solder transfer technique,” IEEE Transactions on Advanced Packaging (IEEE Transactions on Components, Packaging and Manufacturing Technology, Part B: Advanced Packaging), Vol. 28, Issue 4, pp. 643-649, 11/2005
  54. B. A. Parviz, K. Najafi, M. O. Muller, L. P. Bernal, P. D. Washabaugh, “Electrostatically-Driven Synthetic Microjet Arrays As A Propulsion Method For Micro Flight Part II: Microfabrication and Initial Characterization,” J. Microsystem Technologies, Vol. 11, No. 12, pp. 1292-1300, 10/2005
  55. A. Parviz, K. Najafi, M. O. Muller, L. P. Bernal, P. D. Washabaugh, “Electrostatically-Driven Synthetic Microjet Arrays As A Propulsion Method For Micro Flight Part I: Principles Of Operation, Modeling, and Simulation,” J. Microsystem Technologies, Vol. 11, No. 11, pp. 1214-1222, 10/2005
  56. T.J. Harpster, S.A. Nikles, M.R. Dokmeci, K. Najafi, “Long-Term Hermeticity and Biological Performance of Anodically Bonded Glass-Silicon Implantable Packages,” IEEE Transactions on Device and Materials Reliability, Vol. 5, Issue 3, pp. 458-466, 09/2005
  57. P. Mohseni, K. Najafi, S. J. Eliades, and X. Wang, “Wireless multichannel biopotential recording using an integrated FM telemetry circuit,” IEEE Trans. on Neural Systems and Rehabilitation Engineering, (see also IEEE Trans. on Rehabilitation Engineering), Vol. 13, Issue 3, pp. 263-271, 09/2005
  58. P. Mohseni and K. Najafi, “A 1.48-mW Low-Phase-Noise Analog Frequency Modulator for Wireless Biotelemetry,” IEEE Trans. Biomedical Eng., Vol. 52, No. 5, pp. 938-942, 05/2005
  59. J. Chae, H. Kulah, K. Najafi, “A Monolithic Three-Axis Micro-g Micromachined Silicon Capacitive Accelerometer,” IEEE Journal of Microelectromechanical Systems (JMEMS), Vol. 14, No. 2, pp. 235-242, 04/2005
  60. J. Chae, H. Kulah, and K. Najafi, “A CMOS-compatible high aspect ratio silicon-on-glass in-plane micro-accelerometer,” J. Micromechanics and Microengineering, Vo. 15, No. 2, pp. 336-345, 02/2005
  61. M. Ghovanloo, K. Najafi, “A Compact Large Voltage-Compliance High Output Impedance Programmable Current Source for Implantable Microstimulators,” IEEE Trans. Biomedical Engineering, Vol. 52, No. 1, pp. 97-105, 01/2005
  62. M. Ghovanloo, K. Najafi, “A Modular 32-site Wireless Neural Stimulation Microsystem,” IEEE J. Solid-State Circuits, Vol. 39, No. 12, pp. 2457-2466, 12/2004
  63. Ghovanloo, K. Najafi, “A Wideband Frequency-Shift Keying Wireless Link for Inductively Powered Biomedical Implants,” IEEE Trans. On Circuits and Systems I: Fundamental Theory and Applications, Vol. 51, No. 12, pp. 2374-2383, 12/2004
  64. M. Ghovanloo, K. Najafi, “Fully Integrated Wideband High-current rectifiers for Inductively Powered Devices,” IEEE J. Solid-State Circuits, Vol. 39, No. 11, pp. 1976-1984, 11/2004
  65. C. Zhang, and K. Najafi, “Fabrication of Thick Silicon Dioxide Layers For Thermal Isolation,” Journal of Micromechanics and Microengineering, Vol. 14, No. 6, pp. 769 – 774, 11/2004
  66. Y. Mei, J.S. Mitchell, G. Roientan Lahiji, and K. Najafi, “Wafer Bonding Technology For Vacuum Packaging Using Gold-Silicon Eutectic,” Journal of Iranian Association for Electrical and Electronics Engineers (IAEEE), Vol.1, No.2, pp. 27-32, 09/2004
  67. J. Chae, H. Kulah, and K. Najafi, “An In-Plane High-Sensitivity, Low-Noise Micro-g Silicon Accelerometer with CMOS Readout Circuitry,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 13, No. 4, p 628-635, 08/2004
  68. S. Nikles, R.M. Bradley, S. Bledsoe, and K. Najafi, “Design and Testing of Conductive Polysilicon Beam Leads for Use in a High-Density Biomedical Connector,” J. Micromechanics and Microengineering, Vol. 14, No. 7, pp. 957-968, 07/2004
  69. C. Zhang, and K. Najafi, “Fabrication of Thick Silicon Dioxide Layers For Thermal Isolation,” Journal of Micromechanics and Microengineering, Vol. 14, Issue 6, pp. 769 – 774, 06/2004
  70. T. Lisby, S.A. Nikles, K. Najafi, O. Hansen, S. Bouwstra, J.A. Branebjerg, “Mechanical Characterization and Design of Flexible Silicon Microstructures,” IEEE/ASME J. of Microelectromechanical Systems (JMEMS), Vol. 13, No. 3, pp. 452-464, 06/2004
  71. X. Zhu, D.S. Aslam, Y. Tang, B.H. Stark, K. Najafi, “The Fabrication of All-Diamond Packaging Panels With Built-In Interconnects for Wireless Integrated Microsystems,” IEEE/ASME J. of Microelectromechanical Systems (JMEMS), Vol. 13, No. 3, pp. 396-405, 06/2004
  72. P. Mohseni and K. Najafi, “A Fully Integrated Neural Recording Amplifier With DC Input Stabilization,” IEEE Transactions on Biomedical Engineering, Vol. 51, No. 5, pp. 832-837, 05/2004
  73. B. H. Stark and K. Najafi, “A Low Temperature Thin Film Electroplated Metal Vacuum Package,” IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), Vol. 13, No. 2, pp. 147-157, 04/2004
  74. K.D. Wise, D.J. Anderson, J.F. Hetke, K, D.R. Kipke, K. Najafi, “Wireless implantable microsystems: high-density electronic interfaces to the nervous system,” Proceedings of the IEEE, Vol. 92, Issue: 1, pp. 76-97, 01/2004
  75. Y. Shimatani, S. A. Nikles, K.Najafi, and R. M. Bradley, “Long-term recordings from afferent taste fibers,” J. Physiology & Behavior, Vol. 80, Issues 2-3, pp. 309-315, 11/2003
  76. A. Selvakumar, and K. Najafi, “Vertical Comb Array Microactuators,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Volume: 12 Issue: 4, pp. 440-449, 08/2003
  77. N. Yazdi, A. Salian, and K. Najafi, “A High-Sensitivity Silicon Accelerometer with a Folded-Electrode Structure,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 12, No. 4, pp. 479-486, 08/2003
  78. B. H. Stark, M. R. Dokmeci, and K. Najafi, “Improving Corrosion-Resistance of Polysilicon Using Boron Doping and Self-Induced Galvanic Bias,” IEEE Transactions on Advanced Packaging, Vol. 26, No. 3, pp. 295-301, 08/2003
  79. K. Ma, Y. Gianchandani, and K. Najafi, “The Active Dissolved Wafer Process (ADWP) for Integrating Single-Crystal Silicon MEMS with CMOS,” J. of Semiconductor Technology and Science, Vol. 2, No. 4, pp. 273-279, 12/2002
  80. C. Huang, A. Naguib, E. Soupos, and K. Najafi, “A Silicon Micromachined Microphone For Fluid Mechanics Research,” Journal of Micromechanics and Microengineering, Vol. 12, No. 6, pp. 767-774, 11/2002
  81. Y. T. Cheng, W. T. Hsu, L. Lin, C. T. Nguyen, K. Najafi, “Vacuum Packaging Using Localized Aluminum/Silicon-to-Glass Bonding,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 11, No. 5, pp. 556-565, 10/2002
  82. C. Huang, C. Christophorou, K. Najafi, A. Naguib and H. Nagib, “An Electrostatic Microactuator System in High Speed Jets,” IEEE/ASME Journal Of Micro Electro Mechanical Systems (JMEMS), Vol. 11, No. 3, pp. 222-235, 06/2002
  83. T. J. Harpster, S. Hauvespre, M. Dokmeci, and K. Najafi, “A Passive Humidity Monitoring System for In-Situ Remote Wireless Testing of Micropackages,” IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), Vol. 11, No. 1, pp. 61-67, 02/2002
  84. T. J. Harpster, B. Stark, and K. Najafi, “A Passive Wireless Integrated Humidity Sensor,” Sensors and Actuators A: Physical, Volume 95, Issues 2-3, pp. 100-107, 01/2002
  85. O. Akar, T. Akin, And K. Najafi, “A Wireless Batch Sealed Absolute Capacitive Pressure Sensor,” Sensors and Actuators A: Physical, 95 (1), pp. 29-38, 12/2001
  86. J. W. Weigold, K. Najafi, and S. W. Pang, “Design and Fabrication of Submicrometer, Single Crystal Si Accelerometer,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 10, No. 4, pp. 518-524, 12/2001
  87. C. Huang, K. Najafi, “Fabrication of Ultra-Thin P++ Silicon Microstructures Using Ion-Implantation and Boron Etch-Stop,” IEEE/ASME Journal Of Microelectromechanical Systems (JMEMS), Vol. 10, No. 4, pp 532-537, 12/2001
  88. B. Ziaie, and K. Najafi, “An Implantable Microsystem for Tonometric Blood Pressure Measurement,” Journal of Biomedical Microdevices, Vol. 3, pp. 285-292, 12/2001
  89. T. Cheng, L. Lin, K. Najafi, “A Hermetic Glass-Silicon Package Formed Using Localized Aluminum/Silicon-Glass Bonding,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 10, No. 3, pp. 392-399, 09/2001
  90. D. L. Zealear, K. C. Garren, R. Rodriguez, J. Reyes, S. Huang, M. Dokmeci, K. Najafi, “The biocompatibility, positional stability, and potential application of an injectable wireless micromachined microstimulator for reanimation of the paralyzed larynx,” IEEE Trans. On Biomedical Engineering (TBME), Vol. 48, No.8, pp. 890-897, 08/2001
  91. F. Ayazi, and K. Najafi, “A HARPSS polysilicon Vibrating Ring Gyroscope,” IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), Vol. 10, No. 2, pp. 169-179, 06/2001
  92. P. Mohseni, K. Nagarajan, B. Ziaie, K. Najafi, and S.B. Crary, “An Ultralight Biotelemetry Biotelemetry Backpack for Recording EMG Signals in Moths,” IEEE Transactions on Biomedical Engineering, Vol. 48, pp. 734-737, 06/2001
  93. M. Dokmeci and K. Najafi, “A High-Sensitivity Polyimide Capacitive Relative Humidity Sensor For Monitoring Anodically Bonded Hermetic Micropackages,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol.10, No.2, pp. 197-204, 06/2001
  94. A. Selvakumar, N. Yazdi, K. Najafi, “A Wide-Range Micromachined Threshold Accelerometer Array and Interface Circuit,” Journal of Micromechanics and Microengineering, Vol. 11, No. 2, pp. 118-125, 03/2001
  95. B. Ziaie, S.C. Rose, M.D. Nardin, and K. Najafi, “A Self-Oscillating, Detuning-Insensitive Class-E Transmitter for Implantable Microsystems,” IEEE Transactions on Biomedical Engineering, Vol. 48, No. 3, pp. 397-399, 03/2001
  96. F. Ayazi, and K. Najafi, “High Aspect-Ratio Polysilicon Micromachining Technology,” Sensors and Actuators, Vol 87, No. 1-2, pp. 46-51, 12/2000
  97. N. Yazdi, K. Najafi, “An All-Silicon Single-Wafer Micro-g Accelerometer with a Combined Surface and Bulk Micromachining Process,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 9, No. 4, pp. 1-8., 12/2000
  98. B. Ziaie, and K. Najafi, “A Generic Micromachined Silicon Platform for High-Performance RF Passive Components,” J. Micromachanics & Microengineering, Vol. 10, No. 3, pp. 365-371, 09/2000
  99. Y. Gianchandani, H. Kim, M. Shinn, B. Ha, B. Lee, K. Najafi, and C.S. Song, “A Fabrication Process for Integrating polysilicon Microstructures with Post-Processed CMOS Circuits,” J. Micromachanics and Microengineering, Vol. 10, No. 3, pp. 380-386, 09/2000
  100. F. Ayazi, and K. Najafi, “High Aspect-ratio Combined Poly and Single-Crystal (HARPSS) MEMS Technology,” IEEE J. Micro Electro Mechanical Systems, Vol. 9, No. 3, pp. 288-294, 09/2000
  101. N. Yazdi, A. Mason, K. Najafi, and K.D. Wise, “A Generic Interface Chip for Capacitive Sensors in Low-Power Multi-Parameter Microsystems,” Sensors & Actuators, A: Physical, 84 (3) pp. 351-361, 09/2000
  102. Y.T. Cheng, Liwei Lin and K. Najafi, “Localized Silicon Fusion and Eutectic Bonding for MEMS Fabrication and Packaging,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 9, No. 1, pp. 3-8, 03/2000
  103. T. Akin, B. Ziaie, S. A. Nikles, and K. Najafi, “A Modular Micromachined High-Density Connector for Implantable Biomedical Systems,” IEEE Transactions on Biomedical Engineering, Vol. 46, No. 4, pp. 471-480, 04/1999
  104. L. Lin, Y.T. Cheng, and K. Najafi, “Formation of Silicon-Gold Eutectic Bond Using Localized Heating Method,” Japanese Journal of Applied Physics, Part II, Vol. 11B, pp. 1412-1414, 11/1998
  105. N. Yazdi, F. Ayazi, and K. Najafi, “Micromachined Inertial Sensors,” Special Issue of IEEE Proceedings, Vol. 86, No. 8, pp. 1640-1659, 08/1998
  106. A.J. Mason, N. Yazdi, A.V. Chavan, K. Najafi, and K.D. Wise, “A Generic Multi-Element Microsystem For Portable Wireless Applications,” Special Issue of IEEE Proceedings, Vol. 86, No. 8, pp. 1733-1746, 08/1998
  107. A. Selvakumar, F. Ayazi, and K. Najafi, “A High Sensitivity Z-Axis Capacitive Silicon Microaccelerometer With A Torsional Suspension,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 7, No. 2, pp. 192-200, 06/1998
  108. Y. Gianchandani, M. Shinn, and K. Najafi, “Impact of High Thermal Budget Anneals on Polysilicon as a Micromechanical Material,” IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), Vol. 7, Issue 1, pp. 102-105, 03/1998
  109. C. Yeh, and K. Najafi, “CMOS Interface Circuitry For A Low-Voltage Micromachined Tunneling Accelerometer,” IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), Vol. 7, Issue 1, pp. 6-15, 03/1998
  110. T. Akin, K. Najafi, and R.M. Bradley, “A Wireless Implantable Multichannel Digital Neural Recording System for a Micromachined Sieve Electrode,” IEEE J. Solid-State Circuits, Vol. 33, Issue 1, pp. 109-118, 01/1998
  111. Y. Gianchandani, and K. Najafi, “A Silicon Micromachined Scanning Thermal Profiler with Integrated Elements for Sensing and Actuation,” IEEE Trans. Electron Devices, Vol. 44, No. 11, pp. 1857-1868, 11/1997
  112. C. Yeh, and K. Najafi, “A Low-Voltage Tunneling Based Silicon Microaccelerometer,” IEEE Transactions on Electron Devices, Vol. 44, No. 11, pp. 1875-1882, 11/1997
  113. B. Ziaie, M.D. Nardin, A.R. Coghlan, and K. Najafi, “A Single-Channel Implantable Microstimulator for Functional Neuromuscular Stimulation,” IEEE Trans. on Biomedical Engineering, Vol. BME-44, No. 10, 10/1997
  114. R.M. Bradley, X. Cao, T. Akin, and K. Najafi, “Long-Term Chronic Recordings From Peripheral Sensory Fibers Using a Sieve Electrode,” J. Neuroscience Methods, 73, Issue 2, pp. 177-186, 05/1997
  115. J.S. Walter, L. Riedy, W. King, J.S. Wheeler, K. Najafi, C.L. Anderson, T.M. Gudausky, and M. Dokmeci, “Short-Term Bladder-Wall Response to Implantation of Microstimulators,” J. of Spinal Cord Medicine, Vol. 20, No. 3, pp. 319-323, 01/1997
  116. B. Ziaie, J. A. V. Arx, M.R. Dokmeci, and K. Najafi, “A Hermetic Glass-Silicon Micropackage with High-Density On-Chip Feedthroughs for Sensors & Actuators,” IEEE Journal of Microelectromechanical Systems, Vol. 5, No. 3, pp. 166-179, 09/1996
  117. Y. Gianchandani, and K. Najafi, “Bent-Beam Strain Sensors,” IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), pp. 52-58, Vol. 5, No. 1, 03/1996
  118. W.G. Baer, K. Najafi, K.D. Wise, and R.S. Toth, “A 32-Element Micromachined Thermal Imager with On-Chip Multiplexing,” Sensors and Actuators, Vol. 48, No. 1, pp. 47-54, 01/1995
  119. K. Najafi, “Solid-State Microsensors for Cortical Nerve Recordings,” IEEE Eng. in Medicine and Biology Magazine, pp. 375-387, 06/1994
  120. J.F. Hetke, J.L. Lund, K. Najafi, K.D. Wise, and D.J. Anderson, “Silicon Ribbon Cables for Chronically Implantable Microelectrode Arrays,” IEEE Trans. on Biomedical Engineering, Vol. 41, No. 4, pp. 314-321, 04/1994
  121. T. Akin, K. Najafi, Richard H. Smoke, Robert M. Bradley, “A Micromachined Silicon Sieve Electrode for Nerve Regeneration Applications,” IEEE Trans. Biomedical Engineering, Vol. 41, No. 4, pp. 305-313, 04/1994
  122. R. Aroca, H. Bolourchi, D. Battisti, and K. Najafi, “Gas Adsorption and Electrical Properties of Two Langmuir-Blodgett Layers of Cerium Bisphthalocyanine,” Langmuir Journal of the American Chemical Society, 9 (11), pp. 3138-3141, 11/1993
  123. S. Bouwstra, J. van Rooijen, H.A.C. Tilmans, A. Selvakumar, and K. Najafi, “Thermal-Base Drive for Micromechanical Resonators Employing Deep-Diffusion Bases,” Sensors and Actuators, A, 37-38, pp. 38-44, 01/1993
  124. J. Ji, S.T. Cho, Y. Zhang, K. Najafi, K.D. Wise, “An Ultra-miniature CMOS Pressure Sensor for a Multiplexed Cardiovascular Catheter,” IEEE Trans. on Electron Devices, Vol. ED-39, No. 10, pp. 2260-2267, 10/1992
  125. Y. Gianchandani, K. Najafi, “Batch-Assembled Multi-Level Micromachined Mechanisms from Bulk Silicon,” Journal of Micromechanics and Microengineering, Vol. 2, No. 2, pp. 80-85, 06/1992
  126. Y. Gianchandani, K. Najafi, “A Bulk Silicon Dissolved Wafer Process for Microelectromechanical Devices,” IEEE/ASME J. Micro Electro Mechanical Systems (J-MEMS), Vol. 1, No. 2, pp. 77-85, 06/1992
  127. S.T. Cho, K. Najafi, C.L. Lowman, K.D. Wise, “An Ultrasensitive Silicon Pressure-Based Microflow Sensor,” IEEE Trans. Electron Devices, Vol. ED-39, No. 4, pp. 825-835, 04/1992
  128. S.T. Cho, K. Najafi, K.D. Wise, “Internal Stress Compensation and Scaling in Ultrasensitive Silicon Pressure Sensors,” IEEE Trans. Electron Devices, Vol. ED-39, No. 4, pp. 836-842, 04/1992
  129. R.M. Bradley, R.H. Smoke, T. Akin, K. Najafi, “Functional Regeneration of Glossopharyngeal Nerve Through Micromachined Sieve Electrode Arrays,” Brain Research, 594, pp. 84-90, 01/1992
  130. K.D. Wise, K. Najafi, “Microfabrication Techniques for Integrated Sensors and Microsystems,” Science, Vol. 254, pp. 1335-1342, 11/1991
  131. K. Najafi, “Smart Sensors,” Micromech. & Microeng., 1, pp. 86-102, 06/1991
  132. Jin Ji, K. Najafi, Kensall Wise, “A Low-Noise Demultiplexing System Active Multichannel Microelectrode Arrays,” IEEE Transactions of Biomedical Engineering, Vol. 38, #1, 01/1991
  133. K. Suzuki, K. Najafi, K.D. Wise, “A 1024-Element High-Performance Silicon Tactile Imager,” IEEE Trans. Electron Devices, Vol. ED-37, No. 8, pp. 1852-1860, 08/1990
  134. K. Najafi, J.F. Hetke, “Strength Characterization of Silicon Microprobes in Neurophysiological Tissues,” IEEE Trans. on Biomedical Engineering, Vol. BME-37, No. 5, pp. 474-481, 05/1990
  135. S.J. Tanghe, K. Najafi, K.D. Wise, “A Planar IrO Multichannel Stimulating Electrode for Use in Neural Prosthesis,” Sensors and Actuators, pp. 464-467, B1, 01/1990
  136. J. Ji, K. Najafi, K.D. Wise, “A Scaled Electronically-Configurable Multichannel Recording Array,” Sensors and Actuators, pp. 589-591, A21-A23, 01/1990
  137. K. Suzuki, K. Najafi, K.D. Wise, “Process Alternatives and Scaling Limits for High-Density Silicon Tactile Imagers,” Sensors and Actuators, pp. 915-918, A21-A23, 01/1990
  138. K. Najafi, “Integrated Sensors in Biological Environments,” Sensors and Actuators, pp. 453-459, B1, 01/1990
  139. J.F. Hetke, K. Najafi, K.D. Wise, “Flexible Miniature Ribbon Cables for Long-Term Connection to Implantable Sensors,” Sensors and Actuators, pp. 999-1002, A21-A23, 01/1990
  140. K. Najafi, J. Ji, K.D. Wise, “Scaling Limitations of Silicon Multichannel Recording Probes,” IEEE Trans. Biomed. Eng., Vol. BME-37, No. 1, pp. 1-11, 01/1990
  141. K. Najafi, K. Suzuki, “Measurement of Fracture Stress, Young’s Modulus, and Intrinsic Stress of Heavily Boron-Doped Silicon Microstructures,” J. Thin Solid Films, 181, pp. 251-258, 12/1989
  142. D.J. Anderson, K. Najafi, S.J. Tanghe, D.A. Evans, K.L. Levy, J.F. Hetke, X. Xue, J.J. Zappia, K.D. Wise, “Batch-Fabricated Thin-Film Electrodes for Stimulation of the Central Auditory System,” IEEE Trans. Biomed. Eng., Vol. BME-36, No. 7, pp. 693-704, 07/1989
  143. K. Najafi, K.D. Wise, “An Implantable Multielectrode Array with On-Chip Signal Processing,” IEEE J. Solid-State Ckts., Vol. SC-21, No. 6, pp. 1035-1044, 12/1986
  144. S.L. BeMent, D.J. Anderson, K.D. Wise, K. Najafi, K.L. Drake, “Solid-State Electrodes for Multiplexed Multichannel Intracortical Neuronal Recording,” IEEE Trans. Biomed. Eng., Vol. BME-33, No. 2, pp. 230-241, 02/1986
  145. K. Najafi, K.D. Wise, T. Mochizuki, “A High-Yield IC-Compatible Multichannel Recording Array,” IEEE Trans. Electron Devices, Vol. ED-32, No. 7, pp. 1206-1211, 01/1985

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Conference Publications

  1. J. Cho, S. Singh, T. Nagourney, J-K. Woo, A. Darvishian, B. Shiari, G. He, C. Boyd, E. Bently, K. Najafi, High-Q Navigation-Grade Fused-Silica Micro Birdbath Resonator Gyroscope,” Invited Paper/Talk, 2021 IEEE Sensors, 2021, pp. 1-4, doi: 10.1109, 11/2021
  2. K. Najafi, J. Y. Cho, S. Singh, T. Nagourney, J-K. Woo, B. Shiari, A. Davishian, Invited Paper, “Navigation-Grade Precision Shell Gyroscope Made From 3D Fused-Silica Birdbath Resonators,” Joint Conf. European Frequency & Time Forum & Int. Frequency Control Symp., 07/2021
  3. K. Goto, S. Harada, Y. Hata, K. Ito, H. Wado, J. Y. Cho, and K. Najafi. “High Q-Factor Mode-Matched Silicon Gyroscope with a Ladder Structure.” Proceedings, 2020 IEEE Int. Symposium on Inertial Sensors & Systems (INERTIAL), pp. 1-4, 03/2020
  4. S. Singh, J. Y. Cho, K. Najafi,” Low-Cost, High-Throughput Process Using HF Acid to Singulate Fused-Silica Shell Resonators with High-Q,” Proceedings, IEEE Int. Symp. On Inertial Sensors and Systems, Japan, 03/2020
  5. J. Y. Cho, S. Singh, J.-K. Woo, G. He, and K. Najafi, “0.00016 deg/√hr Angle Random Walk (ARW) and 0.0014 deg/hr Bias Instability (BI) from a 5.2M-Q and 1-cm Precision Shell Integrating (PSI) Gyroscope,” Proceedings, IEEE Int. Symp. On Inertial Sensors and Systems, Japan, 03/2020
  6. S. Singh, J. Y. Cho, J.-K. Woo, E. Bentley and K. Najafi, “Shell-in-Shell (SiS): 3D Shell Resonator with 3D Conformal Shell Electrodes,” Proceedings, IEEE Int. Symp. On Inertial Sensors and Systems, Japan, 03/2020
  7. S. Singh, J.-K. Woo, G. He, J. Y. Cho, and K. Najafi, “0.0062 °/√hr Angle Random Walk and 0.027 °/hr Bias Instability From a Micro-Shell Resonator Gyroscope With Surface Electrodes,” Proceedings, IEEE Int. MEMS Conference, pp. 737-740, 01/2020
  8. F. Asgarian and K. Najafi, “Reducing synchronization error in wireless sensor nodes by using previous timing information as training data,” In Proceedings of the 17th Conference on Embedded Networked Sensor Systems, pp. 432-433, 11/2019
  9. A. Darvishian, C. Boyd, S. Singh, J-Y Cho, J-K Woo, G. He, and K. Najafi, “Effect of Electrode Design on Frequency Tuning in Shell Resonators,” In 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 1-4, 04/2019
  10. A. Darvishian, and K. Najafi, “Analysis and Design of Super-Sensitive Stacked (S 3) Resonators for Low-Noise Pitch/Roll Gyroscopes,” In 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 1-4, 04/2019. (Best Paper Award)
  11. G. He, R. Gordenker, J.-K. Woo, J.A. Nees, B. Shiari, T. Nagourney, J.-Y. Cho, K. Najafi, “Laser Self-Mixing Interferometry for Precision Displacement Measurement in Resonant Gyroscopes,” IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Naples, Florida,  04/2019
  12. J.Y. Cho, J.K. Woo, G. He, D. Yang, S.S. Singh, A. Darvishian, B. Shiari, and K. Najafi, “1.5 Million Qfactor vacuum-packaged Birdbath Resonator Gyroscope (BRG),” Proceedings of the 32nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 210-213, 01/2019
  13. S.S. Singh, A. Darvishian, J.Y. Cho, B. Shiari, and K. Najafi, “High-Q 3D Micro-Shell Resonator with High Shock Immunity and Low Frequency Mismatch for MEMS Gyroscopes,” Proceedings of the 32nd IEEE Int. Micro Electro Mechanical Systems (MEMS), Seoul, South Korea, 01/2019
  14. Y. Yuan, and K. Najafi, “Vertical Self-Defined Thin-Film Thermoelectric Thermocouples by Angled Co-Evaporation for Use in micro-TEGs,” Proceedings PowerMEMS Conference, 2018, W2A-02, pp. 1-5, Florida, USA, 11/2018
  15. S. Singh, A. Darvishian, J. Cho, B. Shiari, and K. Najafi, “Resonant Characteristics of Birdbath Shell Resonator in n=3 Wineglass Mode,” Proceedings of the IEEE Sensors Conf., pp. 1-4, New Delhi, India, 10/2018
  16. F. Asgarian, and K. Najafi, “Frequency Scaling in Time Synchronization for Wireless Sensor Networks,” Proceedings of IEEE 14th International Conference on Distributed Computing in Sensor Systems (DCOSS), New York, New York, 06/2018, Best Poster Award
  17. K. Najafi , “Wireless Integrated Micro Systems (WIMS): Past, Present, Future,” Invited Plenary Talk Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head), Hilton Head Island, SC, pp. 50-53, 06/2018
  18. S. Singh, T. Nagourney, J.Y. Cho, A. Darvishian, K. Najafi, B. Shiari, “Design and fabrication of high-Q birdbath resonator for MEMS gyroscopes,” IEEE/ION Position, Location and Navigation Symposium (PLANS), Monterey, California, pp. 15-19, 04/2018
  19. Y.S. Tang, K. Najafi, “High-density wide-range digital accelerometer arrays with high detection resolution,” IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Lake Como, Italy 03/2018
  20. D. Yang, K. Najafi, D.F. Lemmerhirt, J. Mitchell, “A micro thermal and stress isolation platform for inertial sensors,” IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Lake Como, Italy 03/2018
  21. B. Shiari, T. Nagourney, S. Singh, J.Y. Cho, K. Najafi, “Simulation-based approach for fabrication of micro-shell resonators with controllable stiffness and mass distribution,” IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Lake Como, Italy 03/2018
  22. T. Nagourney, S. Singh, B. Shiari, J.Y. Cho, K. Najafi, “Fabrication of hemispherical fused silica micro-resonator with tailored stiffness and mass distribution,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Belfast, United Kingdom, pp. 1000-1003, 01/2018
  23. F. Asgarian, K. Najafi, “Time Synchronization in a Network of Bluetooth Low Energy Beacons,” SIGCOMM, Los Angeles, CA, pp. 119-120, 08/2017
  24. T. Nagourney, J.Y. Cho, B. Shiari, A. Darvishian, K. Najafi, “259 Second Ring-down Time and 4.45 Million Quality Factor in 5.5 kHz Fused Silica Birdbath Shell Resonator,” International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Kaohsiung, Taiwan, pp. 790-793, 06/2017
  25. J.K. Woo, C. Boyd, J.Y. Cho, K. Najafi, “Ultra-low-noise transimpedance amplifier for high-performance MEMS resonant gyroscopes,” International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Kaohsiung, Taiwan, pp. 1006-1009, 06/2017
  26. B. Shiari, T. Nagourney, A. Darvishian, J.Y. Cho, K. Najafi, “Numerical study of impact of surface roughness on thermoelastic loss of micro resonators,” IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Kauai, Hawaii, pp. 7935681, 03/2017
  27. E. Aktakka, J.K. Woo, K. Najafi, “On-chip characterization of scale-factor of a MEMS gyroscope via a micro calibration platform,” IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Kauai, Hawaii, pp. 7935684, 03/2017
  28. C. Boyd, J.K. Woo, J.Y. Cho, T. Nagourney, A. Darvishian, B. Shiari, K. Najafi, “On-chip capacitive sensing and tilting motion estimation of a micro-stage for in situ MEMS gyroscope calibration,” IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Kauai, Hawaii, pp. 7935697, 03/2017
  29. Y. Tang, A. Sandoughsaz, K. Najafi, “Ultra High Aspect-ratio and Thick Deep Silicon Etching (UDRIE),” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, Nevada, pp. 700-703, 02/2017
  30. J.Y. Cho, T. Nagourney, A. Darvishian, K. Najafi, “Ultra Conformal High Aspect-ratio Small-gap Capacitive Electrode Formation Technology for 3D Micro Shell Resonators,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, Nevada, pp. 1169-1172, 02/2017
  31. A. Sandoughsaz, K. Najafi, L. Bernal, “A 2kPa Per Stage and 1.3sccm Flow Rate Modular Two-stage Electrostatic Gas Micropump with Stiffened Drive Electrodes,” IEEE International Conference on Sensors , Orlando, Florida, 01/2017
  32. E. Aktakka, K. Najafi, “Multi-Axis Inertial Energy Harvester Based on Piezoelectric Crab-Legs with Partitioned Electrodes,” (PowerMEMS) 16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications , Vol. 773, Issue 1, 12/2016
  33. J.K. Woo, D. Yang, K. Najafi, S. Lee, J. Mitchell, “Miniaturized Digital Oven-control Microsystem with High Power Efficiency and ±1.8ppm Frequency Drift,” IEEE International Frequency Control Symposium, New Orleans LA, 05/2016
  34. B. Shiari, T. Nagourney, A. Darvishian, J. Cho, and K. Najafi, “Numerical prediction of stress evolution during blowtorch reflow of fused silica microshell resonators,” IEEE International Symposium on Inertial Sensors and Systems (ISS), Laguna Beach CA, pp. 13-16, 03/2016
  35. E.E. Aktakka, K. Najafi, “A Six-Axis Micro Platform for In Situ Calibration of MEMS Inertial Sensors,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, pp. 243-246, 02/2016
  36. Y. Tang, K. Najafi, “High aspect-ratio low-noise multi-Axis accelerometers made from thick silicon,” IEEE International Symposium on Inertial Sensors and Systems (ISS), pp. 121-124, Laguna Beach CA, 02/2016
  37. Y. Tang, K. Najafi, “A two-gap capacitive structure for high aspect-ratio capacitive sensor arrays,” IEEE International Electron Devices Meeting, pp. 18.2.1-18.2.4, Washington DC, 12/2015
  38. D. Yang, J-K. Woo, K. Najafi, S. Lee, J. Mitchell, D. Challoner, “±2PPM Frequency Drift and 300X Reduction of Bias Drift of Commercial 6-Axis Inertial Measurement Units Using A Low-Power Oven-Control Micro Platform,” IEEE International Conference on Sensors, Busan, South Korea, 10.1109/ICSENS.2015.7370326, 11/2015
  39. A. Sandoughsaz, A. Besharatian, L. P. Bernal, and K, Najafi, “Modular Stacked Variable-Compression Ratio Multi-Stage Gas Micropump,” Transducers, Alaska, USA, pp. 704-707, 06/2015
  40. B. Shiari, A. Darvishian, T. Targourney, J. Cho, and K. Najafi, “A Comparison Between Experiments and FEM Predictions for Blowtorch Relow of Fused Silica Micro-Shell Resonators,” IEEE Transducers 2015, pp. 776-779, Anchorage AK, 06/2015
  41. T. Nagourney, J. Cho, A. Darvishian, B. Shiari, and K. Najafi, “Micromachined High-Q Fused Silica Bell Resonator with Compex Profile Curvature Realized Using 3D Micro Blowtorch Molding,” IEEE Tranducers 2015, pp. 1311-1314, Anchorage AK, 06/2015
  42. T. Nagourney, J. Cho, A. Darvishian, B. Shiari, and K. Najafi, “Effect of Metal Annealing on the Q-Factor of Metal-Coated Fused Silica Micro Shell Resonators,” Proc. IEEE 2015 International Symposium on Inertial Sensors and Systems (ISISS 2015), pp. 13-17, Hapuna Beach, HA, 03/2015
  43. A. Darvishian, B. Shiari, G. He, K. Najafi, “Effect of substrate thickness on quality factor of mechanical resonators,” Proc. IEEE 2015 International Symposium on Inertial Sensors and Systems (ISISS 2015), Hapuna Beach, HA, 03/2015
  44. I. Shahosseini and K. Najafi, “Cylindrical Halbach Magnet Array for Electromagnetic Vibration Energy Harvesters,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, Portugal, pp. 1051-1054, 01/2015
  45. E.E. Aktakka and K. Najafi, “Three-Axis Piezoelectric Vibration Energy Harvester,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, Portugal, pp. 1141-1144, 01/2015
  46. J. Cho and K. Najafi, “A High-Q All-Fused Silica Solid-Stem Wineglass Hemispherical Resonator Formed Using Micro Blow Torching and Welding,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, Portugal, pp. 821-824, 01/2015
  47. I. Shahosseini, R.L. Peterson, E.E. Aktakka and K. Najafi, “Electromagnetic Generator Optimization for Non-Resonant Energy Harvester,” IEEE Sensors, Valencia, Spain, pp. 178-181, 11/2014
  48. A. Darvishian, B. Shiari, J. Cho, T. Nagourney and K. Najafi, “Investigation of Thermoelastic Loss Mechanism in Shell Resonators,” ASME International Mechanical Engineering Congress & Exposition (IMECE), Montreal, QC, Canada, pp. 39019, 11/2014
  49. J. Cho, T. Nagourney, A. Darvishian, B. Shiari, J.-K. Woo, , “Fused Silica Micro Birdbath Shell Resonators with 1.2 Million Q and 43 Second Decay Time Constant,” Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head), Hilton Head Island, SC, pp. 103-104, 06/2014
  50. E. E. Aktakka, J.-K. Woo, D. Egert, R. Gordenker, K. Najafi, “A Micro Vibratory Stage for on Chip Physical Stimulation and Calibration of MEMS Gyroscopes,” Proc. 1st IEEE Int. Symposium on Inertial Sensors and Systems (ISISS), Laguna Beach, CA, pp. 151-152, 02/2014
  51. J.-K. Woo, J. Cho, C. Boyd, and K. Najafi,, “Whole-Angle-Mode Micromachined Fused-Silica Birdbath Resonator Gyroscope (WA-BRG),” (MEMS) IEEE International Conference on Micro Electro Mechanical Systems, San Francisco, CA, 01/2014
  52. K. Kumar, A. Besharatian, R. L. Peterson, L. P. Bernal, and K. Najafi,, “Theoretical & Experimental Analysis of Active Valve Pumping for High Flow Rate Applications,” ASME IMECE – International Mechanical Engineering Congress & Exposition, , San Diego, CA, 11/2013
  53. E.E. Aktakka, R.L. Peterson, K. Najafi, “A 6-DOF Piezoelectric Micro Vibratory Stage Based on Multi-Axis Distributed-Electrode Excitation of PZT/SI Unimorph T-Beams,” Transducers, Barcelona, Spain, pp. 1583-1586, 06/2013
  54. A. Besharatian, K. Kumar, R. L. Peterson, L. P. Bernal, K. Najafi, “Valve-Only Pumping in Mechanical Gas Micropumps,” Transducers, Barcelona, Spains, pp. 2640-2643, 06/2013
  55. Z. Cao, Y. Yuan, G. He, R. L. Peterson, K. Najafi, “Fabrication of Multi-Layer Vertically Stacked Fused Silica Microsystems,” Transducers, Barcelona, Spain, pp. 810-813, 06/2013
  56. J. Cho, J.-K. Woo, J. Yan, R. L. Peterson, K. Najafi, “A High-Q Birdbath Resonator Gyroscope (BRG),” Transducers, Barcelona, Spain, pp. 1847-1850, 06/2013
  57. M. Sadeghi, R. L. Peterson, K. Najafi, “A 2-D Directional Air Flow Sensor Array Made Using Stereolithography and MEMS Micro-Hydraulic Structures,” Transducers, Barcelona, Spain, pp. 722-725, 06/2013
  58. B. Shiari, K. Najafi, “Surface Effect Influence on the Quality Factor of Microresonators,” Transducers, Barcelona, Spain, pp. 1715-1718, 06/2013
  59. S. Y. Yee, R. L. Peterson, L. P. Bernal, K. Najafi, “High-Speed Air Microjet Arrays Produced Using Acoustic Streaming For Micro Propulsion,” Transducers, Barcelona, Spain, pp. 1595-1598, 06/2013
  60. S. Y. Yee, R. L. Peterson, L. P. Bernal, K. Najafi, “Highly-Reliable Electrostatic Actuator Using Filleted Electrode Made with Photoresist Solvent Reflow,” Transducers, Barcelona, Spain, pp. 1617-1620, 06/2013
  61. M. Sadeghi, R. L. Peterson, K. Najafi, “High-Speed Electrostatic Micro-Hydraulics for Sensing and Actuation,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1191-1194, 01/2013
  62. Z. Z. Wu, A. Peczalski, V. A. Thakar, Z. Cao, Y. Yuan, G. He, R. L. Peterson, M. Rais-Zadeh, K. Najafi, “Piezoelectrically Transduced High-Q Silica Micro Resonators,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 122-125, 01/2013
  63. J. Cho, J. Yan, J. A. Gregory, H. Eberhart, R. L. Peterson, K. Najafi, “High-Q Fused Silica Birdbath and Hemispherical 3-D Resonators Made by Blow Torch Molding,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 177-180, 01/2013
  64. D. Egert, J. Kaplan, R. L. Peterson, K. Najafi, “Iodine-Treated Starch as Easy-to-use, Biodegradable Material with Controllable Swelling and Stiffening Properties,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 217-220, 01/2013
  65. Y. Tang, R. L. Peterson, K. Najafi, “Technology for Fabricating Dense 3-D Microstructure Arrays for Biomimetic Hair-Like Sensors,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 355-358, 01/2013
  66. Z. Cao, B. VanDerElzen, K. Owen, J. Yan, G. He, R. L. Peterson, D. Grimard, K. Najafi, “DRIE of Fused Silica,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 361-364, 01/2013
  67. E. E. Aktakka, R. L. Peterson, K. Najafi, “A 3-DOF Piezoelectric Micro Vibratory Stage Based on Bulk-PZT/Silicon Crab-Leg Suspensions,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 576-579, 01/2013
  68. M. Sadeghi, K. Dowling, R. L. Peterson, K. Najafi, “High Sensitivity, High Density Micro-Hydraulic Force Sensor Array Utilizing Stereo-Lithography Fabrication Technique,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 673-676, 01/2013
  69. E.E. Aktakka, C.E. Smith, N. Ghafouri, R.L. Peterson, M.M. Hussain, K. Najafi, “Heterogeneous Integration of Co-Evaporated Bismuth/Antimony Telluride Thin Films Based Thermoelectric Harvesters on FinFET CMOS Chip,” PowerMEMS, Atlanta, GA, pp. 97-100, 12/2012
  70. J. McCullagh, R. L. Peterson, T. Galchev, R. Gordenker, Y. Zhang, J. Lynch, and K. Najafi, “Short-Term and Long-Term Testing of a Vibration Harvesting System for Bridge Health Monitoring,” PowerMEMS, Atlanta, GA, pp. 109-112, 12/2012
  71. K. Kumar, A. Besharatian, L. P. Bernal, R. L. Peterson, and K. Najafi, “A Multiphysics Reduced Order Model of Valve Pumping in a 4-Stage Vacuum MicroPump,” ASME 2012 International Mechanical Congress & Exposition (IMECE 2012), Houston, Texas, Proceedings, 11/2012
  72. K. Najafi, “Biomimetic Hair Sensors: Utilizing the Third Dimension,” Sensors 2012, Taipei, Taiwan, Invited Plenary, 10/2012
  73. S. Y. Yee, R. L. Peterson, L. P. Bernal, K. Najafi, “High-frequency Large-deflection Electrostatic Diaphragm Actuators with Maximized Volume Displacement,” Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head), Hilton Head Island, SC, pp. 393-396, 06/2012
  74. E. E. Aktakka, R. L. Peterson, K. Najafi, “Wet Etching & Uniform Wafer-level Thinning of Bulk Piezoelectric Ceramics on Silicon,” Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head), Hilton Head Island, SC, pp. 256-259, 06/2012
  75. J. A. Gregory, J. Cho, K. Najafi, “Characterization and Control of a High-Q MEMS Inertial Sensor using Low-Cost Hardware,” IEEE/ION PLANS 2012 , Myrtle Beach, SC, 05/2012
  76. J. A. Gregory, J. Cho, K. Najafi, “Novel Mismatch Compensation Methods for Rate-integrating Gyroscopes,” IEEE/ION PLANS 2012 , Myrtle Beach, SC, 05/2012
  77. M. M. Sadeghi, R. L. Peterson, K. Najafi, “Hair-based Sensors for Micro-autonomous Systems,” Invited Paper, SPIE Defense, Security, and Sensing 2012, Baltimore, MD, 83731L-1-8, 04/2012
  78. A. Besharatian, K. Kumar, R. L. Peterson, L. P. Bernal, K. Najafi, “A Scalable, Modular, Multi-stage, Peristaltic, Electrostatic Gas Micro-pump,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France,, pp. 1001-1004, 01/2012
  79. K. J. Owen, B. VanDerElzen, R. L. Peterson, K. Najafi, “High Aspect Ratio Deep Silicon Etching,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France,, pp. 251-254, 01/2012
  80. J. Y. Cho, J. A. Gregory, K. Najafi, “High-Q, 3KHz Single-crystal-silicon Cylindrical Rate-integrating Gyro (CING),” IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France,, pp. 172-175, 01/2012
  81. M. M. Sadeghi, R. L. Peterson, K.Najafi, “Micro-Hydraulic Structure for High Performance Bio-Mimetic Air Flow Sensor Arrays,” IEEE International Electron Devices Meeting (IEDM’11), Washington, DC, pp. 673-676, 12/2011
  82. E.E. Aktakka, R.L. Peterson, K. Najafi, “Multi-Layer PZT Stacking Process for Piezoelectric Bimorph Energy Harvesters,” 11th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS’11), Seoul, Republic of Korea, pp. 139-142, 11/2011
  83. A. Borna, K. Najafi, “A Low Power, Low Voltage, User-Programmable, Wireless Interface for Reliable Neural Recording,” IEEE Biomedical Circuits and Systems Conference, San Diego CA, 11/2011
  84. N. Ghafouri, R.L. Peterson, C. Uher, and K. Najafi, “Effect of Substrates on Co-evaporated Bi2Te3 and Sb2Te3 Thin Films,” 30th International Conference on Thermoelectrics, Traverse City MI, 07/2011
  85. N. Ghafouri, R.L. Peterson, C. Uher, and K. Najafi, “Thermoelectric Properties Optimization of Thermally Co-evaporated P-type (Bi0.25Sb0.75)2Te3 Thin Films,” 30th International Conference on Thermoelectrics, Traverse City MI, 07/2011
  86. J. Gregory, J. Cho, K. Najafi, “MEMS Rate and Rate-integrating Gyroscope Control with Commercial Software Defined Radio Hardware,” 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE Transducers), Beijing China, pp. 2394-2397, 06/2011
  87. K. Najafi, T. Galchev, E.E. Aktakka, R.L. Peterson, J. McCullagh, “Microsystems for Energy Harvesting,” Invited Paper, 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers’11), Beijing, China, pp. 1845-1850, 06/2011
  88. D. Egert and K. Najafi, “Parylene Microprobes with Engineered Stiffness and Shape for Improved Insertion,” 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers’11), Beijing, China, pp. 198-201, 06/2011
  89. D. Egert, R.L. Peterson, K. Najafi, “New Class of Chronic Recording Multichannel Neural Probes with Post-Implant Self-Deployed Satellite Recording Sites,” 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE Transducers), Beijing China, pp. 958-961, 06/2011
  90. E.E. Aktakka, R.L. Peterson K. Najafi, “Thinned PZT on SOI Process and Design Optimization for Piezoelectric Inertial Energy Harvesting,” 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE Transducers), Beijing China, pp. 1649-1652, 06/2011
  91. T. Galchev, J. McCullagh, R.L. Peterson, and K. Najafi, “Harvesting Traffic Induced Bridge Vibrations,” 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE TRANSDUCERS), Beijing, China, pp. 1661-1664, 06/2011
  92. J. Cho, J.A. Gregory, K. Najafi, “Single-Crystal-Silicon Vibratory Cylindrical Rate Integrating Gyroscope (CING),” 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE TRANSDUCERS), Beijing, China, pp. 2813-2816, 06/2011
  93. T. Galchev, J. McCullagh, R. L. Peterson, K. Najafi, A. Mortazawi, “Energy Harvesting of Radio Frequency and Vibration Energy to Enable Wireless Sensor Monitoring of Civil Infrastructure,” Proc. SPIE Smart Structures/NDE, San Diego, CA, v 7983, p. 798314, 03/2011
  94. E.E. Aktakka, R.L. Peterson, K. Najafi, “A Self-Supplied Inertial Piezoelectric Energy Harvester with Power Management IC,” IEEE International Solid-State Circuits Conference (ISSCC’11), San Francisco, USA, pp.120-121, 02/2011
  95. E.E. Aktakka, R.L. Peterson, K. Najafi, “A CMOS-Compatible Piezoelectric Vibration Energy Scavenger Based on the Integration of Bulk PZT Films on Silicon,” IEEE International Electron Devices Meeting (IEDM’10), San Francisco, USA, pp. 31.5.1-31.5.4, 12/2010
  96. M. Kurata, J.P. Lynch, T. Galchev, M.P. Flynn, P. Hipley, V. Jacob, G. van der Linden, A. Mortazawi, K. Najafi, R. L. Peterson, L.-H. Sheng, D. Sylvester, E. Thometz, , “Two-Tiered Self-Powered Wireless Monitoring System Architecture for Bridge Health Management,” SPIE Smart Structures and Materials, San Diego CA, 03/2010
  97. T. Galchev, E.E. Aktakka, H. Kim and K. Najafi, “A Piezoelectric Frequency-increased Power Generator for Scavenging Low-frequency Ambient Vibration,” IEEE Int. Conference on Micro Electro Mechanical Systems (MEMS), Hong Kong, pp. 1203-1206, 01/2010
  98. M. Sadeghi, H. Kim and K. Najafi, “Electrostatically Driven Micro-Hydraulic Actuator Arrays,” IEEE Int. Conference on Micro Electro Mechanical Systems (MEMS), Hong Kong, pp. 15-18, 01/2010
  99. S-H. Lee, J. Mitchell, W. Welch III, S. Lee, K. Najafi, “Wafer-level vacuum/hermetic packaging technologies for MEMS,” SPIE MEMS-MOEMS Symposium, San Francisco CA, Vol. 7592, 759205, 01/2010
  100. K. Najafi, “Wireless Integrated Microsystems for Neural Prostheses,” Plenary Presentation, 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Xiamen, China, 01/2010
  101. H. Kim, K. Najafi, and J.W. Park, “Micro hydraulic piston arrays for hydraulic actuator array for pneumatic-less portable large-scale microfluidic systems,” 5th Conf. of NanoUtah (NANO UTAH ’09), Salt Lake City UT, 10/2009
  102. T. Galchev, H. Kim, and K. Najafi, “A Parametric Frequency Increased Power Generator for Scavenging Low-Frequency Ambient Vibrations,” Eurosensors XXIII, Lausanne, Switzerland, 09/2009
  103. A. Borna, T. Marzullob, G. Gage, K. Najafi, “A Small, Light-Weight, Low-Power, Multichannel Wireless Neural Recording Microsystem,” The 31st Annual International IEEE EMBS Conference, Minneapolis MN, pp. 5413-5416, 09/2009
  104. T. V. Galchev, H. Kim, and K. Najafi, “Non-Resonant Bi-Stable Frequency- Increased Power Scavenger From Low Frequency Ambient Vibration,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers 2009), Denver CO, pp. 632–635, 06/2009
  105. A. Gross, G. S. Hwang, B. Huang, H. Yang, N. Ghafouri, H. Kim, C. Uher, M. Kaviany, and K. Najafi, “High- Performance Micro Scale Thermoelectric Cooler: An Optimized 6-Stage Cooler,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers 2009), Denver CO, pp. 2413–2416, 06/2009
  106. S. Lee, S. Y. Yee, A. Besharatian, H. Kim, L. P. Bernal, and K. Najafi, “Adaptive Gas Pumping by Controlled Timing of Active Microvalves in Peristaltic Micropumps,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers 2009), Denver CO, pp. 2294–2297, 06/2009
  107. J. S. Mitchell and K. Najafi, “A Detailed Study of Yield and Reliability for Vacuum Packages Fabricated in a Wafer-Level Au-Si Eutectic Bonding Process,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers 2009), Denver CO, pp. 841–844, 06/2009
  108. E. E. Aktakka, H. Kim, and K. Najafi, “Wafer Level Fabrication of High Performance MEMS Using Bonded and Thinned Bulk Piezoelectric Substrates,” IEEE International Conference on Solid-State Sensors and Actuators (Transducers 2009), Denver CO, pp. 849–852, 06/2009
  109. J. P. Lynch, K. Kamat, V. C. Li,M. P. Flynn, D. Sylvester, K. Najafi, T. Gordon, M. Lepech, A. Emami-Naeini, A. Krimotat, M. Ettouney, S. Alampalli, T. and Ozdemir, “Overview of a Cyber-enabled Wireless Monitoring System for the Protection and Management of Critical Infrastructure Systems,” Invited Paper, SPIE Smart Structures and Materials, San Diego CA, 03/2009
  110. S. -H. Lee, J. Cho, S. W. Lee, M. F. Zaman, F. Ayazi, and K. Najafi, “A Low-Power Oven-Controlled Vacuum Package Technology For High-Performance MEMS,” IEEE Int. Conference on Micro Electro Mechanical Systems (MEMS), Sorrento, Italy, pp. 753-756, 01/2009
  111. H. Kim, and K. Najafi, “An Electrically-Driven, Large-Deflection, High-Force Micro Piston Hydraulic Actuator Array For Large-Scale Microfluidic Systems,” IEEE Int. Conference on Micro Electro Mechanical Systems (MEMS), Sorrento, Italy, pp. 483-486, 01/2009
  112. N. Ghafouri, H. Kim, M.Z. Atashbar, K. Najafi, “A micro thermoelectric energy scavenger for a hybrid insect,” 2008 IEEE International Sensors Conference, Italy, pp. 1249 – 1252, 10/2008
  113. D. Egert, H. Kim, and K. Najafi, “Characterization of Parylene bonding for vacuum packaging,” Int. Conf. on Solid-State Sensors and Actuators, EUROSENSORS (EUROSENSORS 2008), Dresden, Germany, 09/2008
  114. E. Romero, T. Galchev, E. Aktakka, N. Ghafouri, H. Kim, M. Neuman, K. Najafi, and R. Warrington, “Micro Energy Scavengers,” Int. Conference on Commercialization of Micro and Nano Systems (COMS 2008), Puerto Vallarta, 09/2008
  115. E.E. Aktakka, H. Kim, M., and K. Najafi, “Mechanical Energy Scavenging from Flying Insects,” Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp.382-383, 06/2008
  116. K. Najafi, “Wireless Implantable Microsystems for Neural Recording and Stimulation,” Invited Paper, 2008 Joint 6th International IEEE Northeast Workshop on Circuits and Systems and TAISA Conference, NEWCAS-TAISA 2008, Montreal, Canada, pp. iv-iv, 06/2008
  117. A. Gross, G-S Hwang, C. Lawrence, S-W Lee, H. Kim, C. Uher, M. Kaviany, K. Najafi, “A Multistage In-Plane Micro-Thermoelectric Cooler,” , IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS), Tucson AZ, pp. 840-843, 01/2008
  118. Warren C. Welch III and K. Najafi, “Gold-Indium Transient Liquid Phase (TLP) Wafer Bonding For MEMS Vacuum Packaging,” IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS), Tucson AZ, pp. 806-809, 01/2008
  119. H. Kim, S. Lee, and K. Najafi, “High-force liquid-gap electrostatic hydraulic micro actuators,” . 11th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (µTAS ’07), Paris, France, Vol. 2, pp. 1735-1737, 10/2007
  120. K. Najafi, “Packaging of Implantable Microsystems,” Invited Paper, IEEE Int. Sensors Conference, Atlanta GA, 10/2007
  121. S.W. Yoon, S.W. Lee, N.C. Perkins, K. Najafi, “Vibration Sensitivity of MEMS Tuning Fork Gyroscopes,” IEEE Int. Sensors Conference, Atlanta GA, pp. 115-119, 10/2007
  122. K. Najafi, “Wireless Integrated Microsystems for Environmental Monitoring and Implantable Prostheses,” Invited Plenary Talk, Canadian Workshop on MEMS, Montreal, Canada, 08/2007
  123. J.S. Mitchell, J.M. Giachino and K. Najafi, “Wafer Level Vacuum/Hermetic Packaging of MEMS Devices,” Sensors Expo and Conference, Rosemont IL, 06/2007
  124. E.T. Zellers, S. Reidy, R.A. Veeneman, R. Gordenker, W.H. Steinecker, G.R. Lambertus, H. Kim, J.A. Potkay, M.P. Rowe, Q. Zhong,C. Avery, H.K. L. Chan, R.D. Sacks, K. Najafi, K.D. Wise, “An Integrated Micro-Analytical System For Complex Vapor Mixtures,” Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers ’07), Lyon, France, Vol. 2, pp. 1491-1496 (3A3.1), 06/2007
  125. A.M. Sodagar, G. E. Perlin, Y. Yao, K. D. Wise, K. Najafi, “An Implantable Microsystem for Wireless Multi-Channel Cortical Recording,” Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers ’07), Lyon, France, Vol. 1, pp. 69-76 (1C4.5), 06/2007
  126. W. C. Welch, K. Najafi, “Nickel-Tin Transient Liquid Phase (TLP) Wafer BondingFor MEMS Vacuum Packaging,” Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers ’07), Lyon, France, Vol. 1, pp. 1327-1332, 06/2007
  127. S-H. Lee, S.W. Lee, and K. Najafi, “A Generic Environment-Resistant Packaging Technology For MEMS,” Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers ’07), Lyon, France, Vol. 1, pp. 335-340 (2A2.3), 06/2007
  128. H. Kim, William H. Steinecker, S. Reidy, Gordon R. Lambertus, A.A. Astle, K. Najafi, Edward T. Zellers, L.P. Bernal, P.D. Washabaugh, and K.D. Wise, “A Micropump-Driven High-Speed MEMS Gas Chromatography System,” Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers ’07), Lyon, France, Vol. 2, pp. 1505-1508, 06/2007
  129. A.M. Sodagar, G. E. Perlin, Y. Yao, K. Najafi, K. D. Wise, “Chronic Neural Recording with a 64-Channel Cortical Microsystem,” IEEE EMBS Conference on Neural Engineering, The Kohala Coast, HI, pp. 402-405, 05/2007
  130. K. Najafi, “Micromachined Gas Chromatography Microsystem for Complex Gas Analysis,” Invited Plenary Talk, DARPA Microsystems Technologies Office Symposium, San Jose CA, 03/2007
  131. S. Lee, J. Cho, and K. Najafi, “Fabrication of Vertical Comb Electrodes Using Selective Anodic Bonding,” IEEE 20th Int. Conf. Micro Electro-Mechanical Systems Workshop (MEMS 2007), Kobe, Japan, pp. 349-352, 01/2007
  132. H. Kim, A. Astle, K. Najafi, L. Bernal, and P. Washabaugh, “A fully integrated high-efficiency peristaltic 18-stage gas micropump with active microvalves,” IEEE 20th Int. Conf. Micro Electro-Mechanical Systems Workshop (MEMS 2007), Kobe, Japan, pp. 131-134, 01/2007
  133. H. Kim, A. Jaregui, C. Morrison, K. Najafi, L. Bernal, and P. Washabaugh, “Low-power electrostatic microthruster for propulsion based on Helmholtz-resonance,” IEEE 20th Int. Conf. Micro Electro-Mechanical Systems Workshop (MEMS 2007), Kobe, Japan, pp. 127-130, 01/2007
  134. T. Galchev, W. C. Welch III, and K. Najafi, “Low-Temperature MEMS Process Using Plasma Activated Silicon-On-Silicon (SOS) Bonding,” IEEE 20th Int. Conf. Micro Electro-Mechanical Systems Workshop (MEMS 2007), Kobe, Japan, pp. 309-312, 01/2007
  135. J.S. Mitchell and K. Najafi, “Localized Back-Side Heating for Low -Temperature Wafer-Level Bonding,” IEEE 20th Int. Conf. Micro Electro-Mechanical Systems Workshop (MEMS 2007), Kobe, Japan, pp. 377-380, 01/2007
  136. A. M. Sodagar, K. D. Wise, K. Najafi, “Fully-Integrated Mixed-Signal Neural Processor for Implantable Multi-Channel Cortical Recording,” IEEE Biomedical Circuits and Systems Conference (BioCAS’06), London, United Kingdom, pp. 37-40, 11/2006
  137. A. M. Sodagar, K. D. Wise, K. Najafi, “An Interface Chip for Power and Bidirectional Data Telemetry in an Implantable Cochlear Microsystem,” IEEE Biomedical Circuits and Systems Conference (BioCAS’06), London, United Kingdom, pp. 1-4, 11/2006
  138. H. Kim, W. Steinecker, G. Lambertus, A. Astle, K. Najafi, E. Zellers, L. Bernal, and K. Wise, “Integrated high-pressure 4-stage micro gas pump for high-speed micro gas chromatography,” 10th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (µTAS ’06), Tokyo, Japan, pp. 1037-1039, 11/2006
  139. H. Kim, A. Astle, L. Bernal, K. Najafi, and P. Washabaugh, “Directional pumping performance of an electrostatic checkerboard microvalve,” ASME Int. Mechanical Engineering Congress & Exposition (ASME ’06), Chicago IL, IMECE 2006-16211, 11/2006
  140. A. M. Sodagar, K. D. Wise, K. Najafi, “A Neural Signal Processor for an Implantable Multi-Channel Cortical Recording Microsystem,” 28th IEEE International Engineering in Medicine and Biology Conference (EMBC’06), New York City NY, 08/2006
  141. A. Sodagar, K.D. Wise, and K. Najafi, “Generic Controller Dedicated to Telemetry-Controlled Microsystems,” 28th IEEE International Engineering in Medicine and Biology Conference (EMBC’06), New York City NY, 08/2006
  142. P. Mohseni, and K. Najafi, “A 1-MHz, 5-kb/s Wireless Command Receiver for Electronic Site Selection in Multichannel Neural Biopotential Recording,” 28th IEEE International Engineering in Medicine and Biology Conference (EMBC’06), New York City NY, 08/2006
  143. A.M. Sodagar, M. Ghovanloo, K. Najafi, and K.D. Wise, “Fully-Integrated CMOS Power Regulator for Telemetry-Powered Implantable Biomedical Microsystems,” Fully-Integrated CMOS Power Regulator for Telemetry-Powered Implantable Biomedical Microsystems, San Jose, CA, pp. 659-662, 08/2006
  144. A. M. Sodagar, K. Najafi, “Wireless Interfaces for Implantable Biomedical Microsystems,” 49th IEEE International Midwest Symposium on Circuits and Systems (MWSCAS’06), pp. 265-269, 08/2006
  145. L. C. McAfee, K. Najafi, Y.B. Gianchandani, K. D. Wise, and M. M. Maharbiz, D.M. Aslam, P.L. Bergstrom, C.R. Friedrich, “MEMS and Microsystem Courses with National and International Dissemination,” American Society for Engineering Education, 2006 ASEE Annual Conference and Exposition, Chicago IL, 2006-2332, 06/2006
  146. H. Kim, A.A. Astle, K. Najafi, L.P. Bernal, and P.D. Washabaugh, “Integrated Peristaltic 18-Stage Electrostatic Gas Micro Pump With Active Microvalves,” Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 292-295, 06/2006
  147. T. Galchev, W.C. Welch III, and K. Najafi, “Silicon-On-Silicon (SOS): A New CMOS Compatible Low-Temperature MEMS Process Using Plasma Activated Fusion Bonding,” Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 100-101, 06/2006
  148. H. Kim, A.H. Jauregui, C. Morrison, K. Najafi, L.P. Bernal, and P.D. Washabaugh, “Low Power Electrostatic Helmholtz-Resonance Microjet Generator For Propulsion And Cooling,” Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 296-299, 06/2006
  149. A.B. Ucok, J.M. Giachino, and K. Najafi, “Testing And Assembly Of WIMS Cubes Containing Passive And Active Integrated Cables,” Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 400-403, 06/2006
  150. S.W. Yoon, S. Lee, N.C. Perkins, and K. Najafi, “Shock Protection Using Soft Coatings As Shock Stops,” Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 396-399, 06/2006
  151. J.S. Mitchell, and K. Najafi, “Backside Resistive Localized Heating For Low Temperature Wafer-Level Bonding And Packaging,” Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 352-355, 06/2006
  152. J.S. Mitchell, G.R. Lahiji, and K. Najafi, “Long-Term Reliability, Burn-In And Analysis Of Outgassing In Au-Si Eutectic Wafer-Level Vacuum Packages,” Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 376-379, 06/2006
  153. G. J. O’Brien, D. J. Monk And K. Najafi, “SOI MEMS Process Insensitive To Sacrificial Oxide Etch Induced Substrate Anchor Variation With Selectable Substrate Isolation And Low Resistance Substrate Contact,” Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 47-50, 06/2006
  154. K. Najafi, and M. Maharbiz, “What Should A First College Course On Mems Be?,” Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 55-58, 06/2006
  155. L. C. McAfee, K. Najafi, Y.B. Gianchandani, K. D. Wise, and M. M. Maharbiz, D.M. Aslam, P.L. Bergstrom, C.R. Friedrich, “A MEMS/Microsystem Curriculum With International Dissemination,” Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 1-6, 06/2006
  156. J.S. Mitchell, G.R. Lahiji, and K. Najafi, “Au-Si Eutectic For Wafer Bonding and Wafer-Level Vacuum Packaging,” 2nd Int. Workshop on Wafer Bonding for MEMS Technologies, Halle, Germany, pp. 63-64, 04/2006
  157. S. Yoon, N. Yazdi, J. Chae, N. Perkins, and K. Najafi, “Shock Protection Using Integrated Nonlinear Spring Shock Stops,” 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Istanbul, Turkey, pp. 702-705, 01/2006
  158. S-H Lee, J. Chae, N. Yazdi, and K. Najafi, “Micro-Brush Press-On Contact: A New Technique For Room Temperature Electrical And Mechanical Attachment,” 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Istanbul, Turkey, pp. 342-345, 01/2006
  159. H. Kim, A. Astle, K. Najafi, L. Bernal, P. Washabaugh, and F. Cheng, “Bi-directional electrostatic microspeaker with two large-deflection flexible membranes actuated by single/dual electrodes,” 4th IEEE Conf. on Sensors (Sensors ’05), Irvine CA, 11/2005
  160. A. Astle, L.P. Bernal, H. Kim, K. Najafi, P.D. Washabaugh, C. Morrison, “Theoretical and Experimental Performance of a High Frequency Micro Pump,” ASME International Mechanical Engineering Congress & Exposition, Orlando FL, IMECE2005-81626, 11/2005
  161. H. Kim, K. Najafi, A. Astle, L. Bernal, and P. Washabaugh, “Fabrication And Performance Of A Dual-Electrode Electrostatic Peristaltic Gas Micropump,” The Ninth International Conference on Miniaturized Chemical and Biochemical Analysis Systems (MicroTAS 2005), Boston MA, pp. 1173-1176, 10/2005
  162. R. Panday, X.A. Fu, S. Rajgopal, T. Lisby, S.A. Nikles, K. Najafi, and M. Mehregany, “Mechanical Testing of Flexible Silicon Carbide Interconnect Ribbons,” International Conference on Silicon Carbide and Related Materials, Pittsburgh PA, 09/2005
  163. W.C. Welch III, M. Dokmeci, N. Yazdi, and K. Najafi, “A Flux-Free Pb-Sn Solder Bonding Technology for Wafer-Level Chip-Scale Vacuum Packaging,” ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems (InterPack05), San Francisco CA, 07/2005
  164. J.S. Mitchell, G.R. Lahiji and K. Najafi, “Reliability and Characterization of Micro-Packages in a Wafer Level Au-Si Eutectic Vacuum Bonding Process,” ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems (InterPack05), IPACK2005-73341, 07/2005
  165. S.W. Yoon, N. Yazdi, N.C. Perkins, and K. Najafi, “Novel Integrated Shock Protection for MEMS,” IEEE Int. Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS 2005), Vol. 1, pp. 396-400 (2B3.2), 06/2005
  166. W.C. Welch III, J. Chae, S. Lee, and K. Najafi, “Transient Liquid Phase (TLP) Bonding for MEMS Packaging Applications,” IEEE Int. Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS 2005), Seoul, Korea, Vol. 2, pp. 1350-1353 (3E4.9), 06/2005
  167. J.S. Mitchell, G.R. Lahiji and K. Najafi, “Encapsulation of vacuum sensors on a wafer level package using a gold-silicon eutectic,” IEEE Int. Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS 2005), Seoul, Korea, Vol. 1, pp. 928-931 (2E4.119), 06/2005
  168. H. Kim, and K. Najafi, “Characterization of Parylene-assisted wafer bonding: Long-term stability and influence of process chemicals,” IEEE Int. Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS 2005), Seoul, Korea, Vol. 1, pp. 2015-2018 (4A2.1), 06/2005
  169. M. Ghovanloo, and K. Najafi, “A Three-Dimensional Microassembly Structure for Micromachined Planar Microelectrode Arrays,” 3rd Annual IEEE EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, Oahu HI, pp. 112-115, 05/2005
  170. H. Kulah, and K. Najafi, “An Electromagnetic Micro Power Generator for Low-Frequency Environmental Vibrations,” 2005 SAE World Congress, Detroit MI, Paper #05MV-35, 04/2005
  171. H. Kulah, J. Chae, and K. Najafi, “Micromachined Accelerometers for Inertial Navigation Applications,” 2005 SAE World Congress, Detroit MI, Paper #05MV-36, 04/2005
  172. M. Ghovanloo and K. Najafi, “A Tri-state FSK Demodulator for Asynchronous Timing of High-rate Stimulation Pulses in Wireless Implantable Microstimulators,” IEEE/EMBS Conf. on Neural Engineering, pp. 116-119, 03/2005
  173. S. A. Nikles, S. Bledsoe, R. M. Bradley, and K. Najafi, “A 32-Channel Active High-Density Connector for Biomedical Applications,” IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 580-583, 01/2005
  174. A.B. Ucok, J. Giachino, and K. Najafi, “Modular Assembly/Packaging Of Multi-Substrate Microsystems (WIMS Cube) Using Thermo-Magnetically Actuated Cables,” IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 536-539, 01/2005
  175. S. Lee, J. Chae, S. Yoon, N. Yazdi, and K. Najafi, “Low-power Thermal Isolation for Environmentally Resistant Microinstruments,” IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 532-535, 01/2005
  176. W.C. Welch III and K. Najafi, “Transfer of Metal MEMS Packages Using a Wafer-Level Solder Sacrificial Layer,” IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 584-587, 01/2005
  177. J. Chae, J. Giachino, and K. Najafi, “Wafer-level Vacuum Package with Vertical Feedthroughs,” IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 548-551, 01/2005
  178. J.S. Mitchell, G.R. Lahiji and K. Najafi, “An Improved Performance Poly Si Pirani Vacuum Gauge Using Heat Distributing Structural Supports,” IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 291-294, 01/2005
  179. B.H. Stark, J. Chae, A. Kuo, A. Oliver, and K. Najafi, “A High-Performance Surface-Micromachined Pirani Gauge in SUMMIT V™,” IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp.295-298, 01/2005
  180. P. Mohseni and K. Najafi, “A Battery-Powered 8-channel Wireless FM IC for Biopotential Recording Applications,” IEEE Int. Solid-State Circuits Conference (ISSCC), San Francisco CA, pp. 560-561, 01/2005
  181. N. Yazdi, H. Kulah, and K. Najafi, “Precision Readout Circuits for Capacitive Microaccelerometers,” Third IEEE International Conference on Sensors, Vienna, Austria, pp. 28-31, 10/2004
  182. K. King, S.W. Yoon, N.C. Perkins, and K. Najafi, “The Dynamics of the Golf Swing as Measured by Strapdown Inertial Sensors,” 5th International Conference on the Engineering of Sport, Davis CA, vol. 2, pp. 276-282, 09/2004
  183. P. Mohseni, and K. Najafi, “Wireless Multichannel Biopotential Recording Using an Integrated FM Telemetry Circuit,” 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBS), San Francisco, CA, 09/2004
  184. M. Ghovanloo, K.J. Otto, D.R. Kipke, and K. Najafi, “In Vitro and In Vivo Testing of a Wireless Multichannel Stimulating Telemetry Microsystem,,” 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBS), San Francisco CA, pp. 4294-4297, 09/2004
  185. K. Najafi, and M. Ghovanloo, “A Multichannel Monolithic Wireless Microstimulator,” 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBS), San Francisco CA, pp. 4197-4200, 09/2004
  186. H. S. Kim, A. B. Ucok, and K. Najafi, “Large deflection stacked multi-electrode electrostatic Actuator,” Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island SC, pp. 340-343, 06/2004
  187. H. Yu, R. Olsson, K.D. Wise, and K. Najafi, “A wireless microsystem for multichannel neural recording microprobes,” Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island SC, pp. 107-110, 06/2004
  188. A. B. Ucok, J. M. Giachino, and K. Najafi, “The WIMS Cube: A Microsystem Package With Actuated Flexible Connections And Re-Workable Assembly,” Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island SC, pp. 117-120, 06/2004
  189. E. T. Zellers, W. H. Steinecker, G. R. Lambertus, M. Agah, C.-J. Lu, H. K. L. Chan, J. A. Potkay, M.C. Oborny, J. M. Nichols, A. Astle, H. S. Kim, M. P. Rowe, J. Kim, L. W. da Silva, J. Zheng, J. J. Whiting, R. D. Sacks, S. W. Pang, M. Kaviany, P. L. Bergstrom, A. J. Matzger, Ç. Kurdak, L. P. Bernal, K. Najafi, K. D. Wise, “A Versatile MEMS Gas Chromatograph For Determinations Of Environmental Vapor Mixtures,” Invited Paper and Talk, Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island SC, pp. 61-66, 06/2004
  190. M. Ghovanloo and K. Najafi, “A Modular 32-site Wireless Neural Stimulation Microsystem,” IEEE Int. Solid-State Circuits Conference, San Francisco, pp. 226-227, 02/2004
  191. K. D. Wise, K. Najafi, R. Sacks, and E. T. Zellers, “A Wireless Integrated Microsystem for Environmental Monitoring,” Invited Technology Directions Paper, IEEE Int. Solid-State Circuits Conference, San Francisco, pp. 434-435, 02/2004
  192. B. H. Stark and K. Najafi, “A Mold and Transfer Technique for Lead-Free Fluxless Soldering and Application to Wafer-Level Low-Temperature Thin-Film Packages,” 17th IEEE International Conference on Microelectromechanical Systems (MEMS ’04), Maastricht, The Netherlands, pp. 16-19, 01/2004
  193. H. Kulah and K. Najafi, “An Electromagnetic Micro Power Generator for Low-Frequency Environmental Vibrations,” 17th IEEE International Conference on Microelectromechanical Systems (MEMS ’04), Maastricht, The Netherlands, pp. 237-240, 01/2004
  194. J. Chae, B.H. Stark, and K. Najafi, “A Micromachined Pirani Gauge with Dual Heat Sinks,” 17th IEEE International Conference on Microelectromechanical Systems (MEMS ’04), Maastricht, The Netherlands, pp. 532-535, 01/2004
  195. A. Astle, L.P. Bernal, P. Washabaugh, H. Kim and K. Najafi, “Dynamic Modeling And Design Of A High Frequency Micro Vacuum Pump,” ASME International Mechanical Engineering Congress & Exposition Washington, DC, IMECE 2003-41493, 11/2003
  196. C. Zhang, K. Najafi, L.P. Bernal and P. Washabaugh, “Mechanical And Thermal Design Of A Combustion-Based Thermionic Micro Power Generator,” ASME International Mechanical Engineering Congress & Exposition Washington, DC, IMECE 2003-41531, 11/2003
  197. A.B. Ucok, J. Giachino, and K. Najafi, “A High-Density Flexible Connector Array For Multi-Substrate Packages,” ASME International Mechanical Engineering Congress & Exposition Washington, DC, IMECE2003-41562, 11/2003
  198. K. Najafi, J. Chae, H. Kulah and G. He, “Micromachined Silicon Accelerometers And Gyroscopes,” Invited Paper, IROS – IEEE International Robotics and Systems Conference , Las Vegas NV, 10/2003
  199. M. Ghovanloo, and K. Najafi, “A Small Size Large Voltage Compliance Programmable Current Source for Biomedical Implantable Microstimulators,” 25th Annual International Conference of the IEEE Engineering In Medicine And Biology Society, Cancun, Mexico, pp. 1979-1982, 09/2003
  200. S. Nikles, D.S. Pellinen, J. Kitagawa, D. Kipke, RoM. Bradley, and K. Najafi, “Long Term In Vitro Monitoring of Polyimide Microprobe Electrical Properties,” 25th Annual International Conference of the IEEE Engineering In Medicine And Biology Society, Cancun, Mexico, pp. 3340-3343, 09/2003
  201. A. M. Sodagar, and K. Najafi, “A Multi-Output Supply-Independent Voltage Reference in Standard CMOS Process for Telemetry-Powering Applications,” IEEE Int. Symposium on Signals, Circuits and Systems, Lasi, Romania, Volume: 2, pp. 493 –496, 07/2003
  202. H. Kulah, J. Chae and K. Najafi, “Noise Analysis and Characterization of A Sigma-Delta Capacitive Silicon Microaccelerometer,” IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 92-95, 06/2003
  203. B. Stark and K. Najafi, “An Integrated Process for Post-Packaging Release and Vacuum Sealing of Electroplated Nickel Packages,” IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 1911-1914, 06/2003
  204. C. Zhang, L. Bernal, P. Washabaugh, K. Najafi, “Micro Combustion-Thermionic Power Generation: Feasibility, Design and Initial Results,” IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 40-44, 06/2003
  205. G. O’Brien, D. Monk, and K. Najafi, “Angular Accelerometer with Dual Anchor Support,” IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 1371-1374, 06/2003
  206. J. Chae, H. Kulah and K. Najafi, “A Monolithic Three-Axis Silicon Capacitive Accelerometer with Micro-G Resolution,” IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 81-84, 06/2003
  207. H. Kim, K. Najafi, P. Washabaugh, and L. Bernal, “Large-Deflection Out-of-Plane Electrostatic Buckled-Electrode Actuators,” IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 794-797, 06/2003
  208. H. Kim and K, Najafi, “Wafer Bonding Using Parylene and Wafer-Level Transfer of Free-Standing Parylene Membranes,” IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 790-793, 06/2003
  209. A.B. Ucok, J. Giachino, and K. Najafi, “Compact, Modular Assembly and Packaging of Multi-Substrate Microsystems,” IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 1877-1878, 06/2003
  210. M. Ghovanloo, K. Najafi, “A High Data-Rate Frequency Shift keying Demodulator Chip for the Wireless Biomedical Implants,” IEEE International Symposium on Circuits and Systems (ISCAS 2003), Bangkok, Thailand, Vol. 5, pp. 45-48, 05/2003
  211. M. Ghovanloo, K. D. Wise, K. Najafi, “Towards a Button-Sized 1024-Site Wireless Cortical Microstimulating Array,” 1st International IEEE/EMBS Conference on Neural Engineering (NE 2003), Capri Italy, pp. 138-141, 03/2003
  212. P. Mohseni and K. Najafi, “A Wireless FM Multi-Channel Microsystem for Biomedical Neural Recording Applications,” IEEE Southwest Symposium on Mixed-Signal Design (SSMSD 2003), Las Vegas NV, pp. 217-222, 02/2003
  213. M. Ghovanloo, K. Najafi, “A Fully Digital Frequency Shift Keying Demodulator Chip for Wireless Biomedical Implants,” IEEE Southwest Symposium on Mixed-Signal Design (SSMSD 2003), Las Vegas NV, pp. 223-227, 02/2003
  214. H. Kulah, J. Chae, N. Yazdi and K. Najafi, “A Multi-Step Electromechanical Sigma-Delta Converter for Micro-g Capacitive Accelerometers,” IEEE International Conference on Solid-State Circuits Conference (ISSCC 2003), San Francisco CA, pp. 202-203, 02/2003
  215. H. Yu, K. Najafi, “Low-Power Interface Circuits for Bio-Implantable Microsystems,” IEEE International Conference on Solid-State Circuits Conference (ISSCC 2003), San Francisco CA, pp. 194-195, 02/2003
  216. K. Najafi, “Micropackaging Technologies for Integrated Microsystems: Applications to MEMS and MOEMS,” Invited Plenary Talk, SPIE’s Micromachining and Microfabrication Symposium, San Jose CA, pp. 1-19, 01/2003
  217. M. Muller, L. Bernal, P. Washabaugh, H. Kim, K. Najafi, “Resonance Effects of Electrostatically Actuated Acoustic Jets,” 41st Aerospace Sciences Meeting and Exhibit (AIAA), Reno NV, AIAA Paper 2003-1272, 01/2003
  218. J. Chae, H. Kulah, and K. Najafi, “An In-Plane High-Sensitivity, Low-Noise Micro-G Silicon Accelerometer,” EEE International Conference on Micro Electro Mechanical Systems (MEMS 2003), Kyoto Japan, pp. 466-469, 01/2003
  219. T. J. Harpster, and K. Najafi, “Field-Assisted Bonding of Glass to Si-Au Eutectic Solder For Packaging Applications,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2003), Kyoto Japan, pp. 630-633, 01/2003
  220. B. Stark, Y. Mei, C. Zhang, and K. Najafi, ” Doubly Anchored Surface Micromachined Pirani Gauge for Vacuum Package Characterization,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2003), Kyoto Japan, pp. 506-509, 01/2003
  221. X. Zhu, S. Guillaudeu, D. M. Aslam, U. Kim, B. Stark, and K. Najafi, “All Diamond Packaging For Wireless Integrated Micro-Systems Using Ultra-Fast Diamond Growth,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2003), Kyoto Japan, pp. 658-661, 01/2003
  222. K. Wise and K. Najafi, “Fully-Implantable Auditory Prostheses: Restoring Hearing to the Profoundly Deaf,” Invited Paper, IEEE International Electron Devices Meeting (IEDM), San Francisco CA, pp. 499-502, 12/2002
  223. E. Zellers, K. Wise, K. Najafi, D. Aslam, R. Brown, Q. Cai, J. Driscoll, M. Flynn, J. Giachino, R. Gordenker, M. Hsieh, C. Nguyen, P. Bergstrom, J. Drelich, C. Friedrich, E. Gamble, M Kaviany, C. Lu, A. Matzger, M. Oborny, S. Pang, J. Potkay, R. Sacks, W.-C. Tian, W. Steinecker, J. Whiting, Q. Zhong, “Determinations of Complex Vapor Mixtures in Ambient Air with a Wireless Microanalytical System: Vision, Progress, and Homeland Security Applications,” IEEE Conference on Technologies for Homeland Security, Waltham MA, pp. 92-95, 11/2002
  224. C. Zhang, L. Bernal, P. Washabaugh, K. Najafi, “A Micromachined Combustor and its Application to Thermoelectric Power Generation,” ASME IMECE, New Orleans LA, Vol. 2, IMECE2002-33272, 11/2002
  225. B. Stark and K. Najafi, “A Wafer Level Vacuum Packaging Technique Utilizing Electroplated Nickel,” ASME IMECE, New Orleans LA, Vol. 2, IMECE2002-34268, 11/2002
  226. M. Muller, L. Bernal, P. Washabaugh, T.-K. Chou, H. Kim, and K. Najafi, “Acoustically Generated Micromachined Jet Arrays For Micropropulsion Applications,” ASME IMECE, New Orleans LA, Vol. 2, IMECE2002-33630, 11/2002
  227. A. Astle, A. Paige, L. Bernal, J. Munfakh, H. Kim, and K. Najafi, “Analysis And Design Of Multistage Electrostatically-Actuated Micro Vacuum Pumps,” ASME IMECE, New Orleans LA, Vol. 2, IMECE2002-34308, 11/2002
  228. M. Ghovanloo, K. Najafi, “A BiCMOS Wireless Stimulator Chip for Micromachined Stimulating Microprobes,” The IEEE 2nd Joint EMBS-BMES Conference, Houston TX, pp. 2113-2114, 10/2002
  229. P. Mohseni and K. Najafi, “A Low-Power Fully Integrated Bandpass Operational Amplifier For Biomedical Neural Recording Applications,” 2nd Joint IEEE EMBS/BMES Conference, Houston TX, pp. 2111-2112, 10/2002
  230. A. Sodagar, K. Najafi, “A Wide-Range Supply-Independent CMOS Voltage Reference for Telemetry-Powering Applications,” IEEE International Conference on Electronics, Circuits, and Systems (ICECS’02), Dubrovnik, Croatia, pp. 401-404, 09/2002
  231. H. Kulah and K. Najafi, “A Low Noise Switched-Capacitor Interface Circuit for Sub-Micro Gravity Resolution Micromachined Accelerometers,” European Solid-State Circuits Conference ESSCIRC’02, Florence Italy, pp. 635-639, 09/2002
  232. M. Ghovanloo, K. Najafi, “A High Data Transfer Rate Frequency Shift Keying Demodulator Chip for the Wireless Biomedical Implants,” IEEE 45th Midwest Symposium on Circuits and Systems, Tulsa OK, 08/2002
  233. H. Kulah, A. Salian, N. Yazdi, and K. Najafi, “A 5V Closed-Loop Second-Order Sigma-Delta Micro-G Microaccelerometer,” Solid-State Sensor & Actuator Workshop, Hilton Head Island SC, pp. 219-222, 06/2002
  234. Y. Mei, G. R. Lahiji, and K. Najafi, “A Robust Gold-Silicon Eutectic Wafer Bonding Technology for Vacuum Packaging,” Solid-State Sensor and Actuator Workshop, Hilton-Head, S.C., pp. 86-89, 06/2002
  235. G. O’Brien, D. J. Monk, and K. Najafi, “Angular Rate Gyroscope with Dual Anchor Support,” Solid-State Sensor and Actuator Workshop, Hilton-Head, S.C., pp. 285-288, 06/2002
  236. K. Najafi, “Power and Integrated Microsystems,” Plenary Presentation, SPIE International Symposium on Design, Test, Integration, and Packaging of MEMS and MOEMS, Cannes, France, 05/2002
  237. M. Ghovanloo, K. Beach, K. D. Wise, and K. Najafi, “A BiCMOS wireless interface chip for micromachined stimulating microprobes,” IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, Madison WI, pp. 277-282, 05/2002
  238. M. Ghovanloo and K. Najafi, “Fully integrated power supply design for wireless biomedical implants,” IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, Madison WI, pp. 414-419, 05/2002
  239. T-K A. Chou, K. Najafi, M.O. Muller, L.P. Bernal, P.D. Washabaugh, and B. Amirparviz, “Micromachined E-Jet for IC Chip Cooling,” IEEE International Solid-State Circuits Conference, San Francisco CA, pp. 356-357, 02/2002
  240. J. Chae, H. Kulah, and K. Najafi, “A Hybrid Silicon-On-Glass (Sog) Lateral Micro-Accelerometer With CMOS Readout Circuitry,” IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp. 623-626, 01/2002
  241. T-K A. Chou and K. Najafi, “Fabrication Of Out-Of-Plane Curved Surfaces In Si By Utilizing RIE Lag,” IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp. 145-148, 01/2002
  242. G. He, and K. Najafi, “A Single-Crystal Silicon Vibrating Ring Gyroscope,” IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp. 718-721, 01/2002
  243. T-K A. Chou, K. Najafi, M.O. Muller, L.P. Bernal, and P.D. Washabaugh, “Characterization Of Micromachined Acoustic Ejector And Its Applications,” IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp. 264-267, 01/2002
  244. T. J. Harpster and K. Najafi, “Long-Term Testing Of Hermetic Anodically Bonded Glass-Silicon Packages,” IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp.423-426, 01/2002
  245. C. Zhang, and K. Najafi, “Fabrication Of Thick Silicon Dioxide Layers Using DRIE, Oxidation And Trench Refill,” IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp. 160-163, 01/2002
  246. M.O. Müller, L.P. Bernal, P.D. Washabaugh, T-K A. Chou, And K. Najafi, “Flow Field And Performance of High Frequency Micromachined Synthetic Jets,” 40th AIAA Aerospace Sciences Meeting and Exhibit, Reno Nevada, paper # 2002-0974, 01/2002
  247. K. Najafi, “MEMS and Microsystems,” Plenary Presentation, International Semicoductor Device Research Symposium, Washington DC, 12/2001
  248. G. J. O’Brien, D. J. Monk, and K. Najafi, “Submicron High Aspect Ratio Silicon Beam Etch,” SPIE MEMS Symposium, Australia, Vol. 4592, pp. 41-48, 12/2001
  249. H. Yu, and K. Najafi, “Circuitry For A Wireless Microsystem For Neural Recording Microprobes,” International IEEE Engineering in Medicine and Biology Conference (EMBC), Istanbul, Turkey, 10/2001
  250. K. D. Wise, K. Najafi, D. M. Aslam, R. B. Brown, J. M. Giachino, L. C. McAfee, C. T.-C. Nguyen, R. O. Warrington, and E. T. Zellers, “Wireless Integrated MicroSystems (WIMS): The Coming Revolution in the Remote Gathering of Information,” SensorsExpo, Chicago, IL, 06/2001
  251. B. H. Stark and K. Najafi, “An Ultra-Thin Hermetic Package Utilizing Electroplated Gold,” Twelft IEEE Int. Conf. On Solid-State Sensors and Actuators (Transducers ’01), Munich, Germany, Vol. 1, pp. 194-197 (1C3.05P), 06/2001
  252. C. Zhang, K. Najafi, L.P. Bernal & P. Washabaugh, “An integrated combustor-thermoelectric micro power generator,” Twelft IEEE Int. Conf. On Solid-State Sensors and Actuators (Transducers ’01), Munich, Germany, Vol. 1, pp. 34-37 (1A3.03), 06/2001
  253. T.K. Chou, K. Najafi, M.O. Müller, L.P. Bernal & P. Washabaugh, “High-Density micromachined ejector array for micro propulsion,” Twelft IEEE Int. Conf. On Solid-State Sensors and Actuators (Transducers ’01), Munich, Germany, Vol. 2, pp. 890-893 (3A1.03), 06/2001
  254. T-K. A. Chou and K. Najafi, “3D MEMS Fabrication Using Low-Temperature Wafer Bonding With Benzocyclobutene (BCB),” Twelft IEEE Int. Conf. On Solid-State Sensors and Actuators (Transducers ’01), Munich, Germany, Vol. 2, pp. 1570 – 1573 (4C2.01), 06/2001
  255. B. H. Stark, M. Dockmeci, T. J. Harspter, and K. Najafi, “Improving Corrosion resistance and Silicon Glass Micropackages Using Boron Doping and/or Self-Induced Galvanic Bias,”Proceedings of International Reliability Physics Symposium, Orlando, Fl, pp, 455-462, 04/2001
  256. M.O. Müller, L.P. Bernal, P.K. Miska, P.D. Washabaugh, T.-K.A. Chou, B.A. Parviz, C. Zhang & K. Najafi, “Flow structure and performance of axisymmetric synthetic jets,” AIAA 39th Aerospace Sciences Meeting & Exhibit, Reno Nevada, AIAA Paper 2001-1008, 01/2001
  257. Y. T. Cheng, W.T. Hsu, Liwei Lin, C.T. Nguyen, and K. Najafi, “Vacuum Packaging Technology Using Localized Aluminum/Silicon-To-Glass Bonding,” Proceedings of 14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), Interlaken Switzerland, pp. 18-21, 01/2001
  258. B.A. Parviz, T.K. Chou, C. Zhang, K. Najafi, M.O. Müller, L.P. Bernal & P. Washabaugh, “Performance of ultrasonic electrostatic resonators for use in micro propulsion,” Proceedings of 14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), Interlaken Switzerland, pp. 586-589, 01/2001
  259. T. Harpster, B. Stark, and K. Najafi, “A Passive Wireless Integrated Humidity Sensor,” Proceedings of 14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), Interlaken Switzerland, pp. 553-557, 01/2001
  260. Stefan Nikles, Sanford Bledsoe, Robert Bradley, and Khalil Najafi, “Reliability and Contact Resistance of Polysilicon Beams Leads for Use in a High-Density Connector,” Proceedings of 14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), Interlaken Switzerland, pp. 65-67, 01/2001
  261. K. Najafi, “Research in WIreless Integrated Micro Systems (WIMS) at University of Michigan,” Invited Talk, Sensors Expo, Detroit, Michigan, 09/20000
  262. T. Lisby, S. Nikles, K. Najafi, O. Hansen, S. Bouwstra and J. Branebjerg, “Mechanical characterization of flexible silicon microstructures,” Eurosensors 2000, The 14th European Conference on Solid-State Transducers, Copenhagen, Denmark, 08/2000
  263. Orhan Akar, Tayfun Akin, Tim Harpster, and Khalil Najafi, “A Wireless Batch Sealed Absolute Capacitive Pressure Sensor,” Eurosensors 2000, The 14th European Conference on Solid-State Transducers, Copenhagen, Denmark, pp. 585-588, 08/2000
  264. R. Rangarajan, J.A. Von Arx, S. Rose, B. Ziaie, K. Najafi, “Fully Integrated Nerve Electrical Stimulation System,” IEEE Midwest Symposium for Circuits and Systems, Lansing, MI, 08/2000
  265. A. Salian, H. Kulah, N. Yazdi, G. He, and K. Najafi, “A Hybrid Silicon Microaccelerometer System with CMOS Interface Circuit,” IEEE Midwest Symposium for Circuits and Systems, Lansing, MI, 08/2000
  266. H. Kulah, N. Yazdi, and K. Najafi, “A CMOS Switched-Capacitor Interface Circuit for an Integrated Acclerometer,” IEEE Midwest Symposium for Circuits and Systems, Lansing, MI, 08/2000
  267. N. Yazdi, K. Najafi, “Performance limits of a closed-loop micro-G silicon accelerometer with deposited rigid electrodes,” Proceedings of the 12th IEEE International Conference on Microelectronics (ICM 2000), Tehran Iran, pp. 313-316, 08/2000
  268. K. Najafi, “Low-Power Micromachined Micro Systems,” Int. Symposium on Low-Power Electronics and Devices (ISLPED ’00), Portofino, Italy, 07/2000
  269. K. Najafi, “Micromachined Micro Systems: Miniaturization Beyond Microelectronics,” IEEE VLSI Circuits Symposium, Honolulu Hawaii, pp. 6-13, 06/2000
  270. M.O. Muller, L.P. Bernal, R.P. Moran, P.D. Washabaugh, B.A. Parviz, A. T.-K. Chou, C. Zhang, K. Najafi, “Thrust performance of micromachined synthetic jets,” AIAA Fluids 2000 Conference, Denver Colorado, AIAA-2000-2404, 01/2000
  271. M.O. Muller, L.P. Bernal, R.P. Moran, P.D. Washabaugh, B.A. Parviz, K. Najafi, “Micromachined acoustic resonators for microjet propulsion,” AIAA 38th Aerospace Science Conference, Reno NV, AIAA-2000-0547, 01/2000
  272. R.P. Moran, P.D. Washabaugh, M.O. Muller, L.P. Bernal, B.A.Parviz, K. Najafi, “Numerical simulation of micromachined acoustic resonators,” AIAA 38th Aerospace Science Conference, Reno NV, AIAA-2000-0546, 01/2000
  273. J. Chae, H. Kulah, A. Salian, and K. Najafi, “A High-Sensitivity Silicon-On-Glass Lateral Micro-g Microaccelerometer,” Third Annual Micro/NanoTechnology Conference, Houston TX, Nanospace 2000, 01/2000
  274. B.A. Parviz, T.K. Chou, C. Zhang, K. Najafi, M.O. Muller, L.P. Bernal, and P. Washabaugh, “A Wafer-Integrated Array of Micromachined Electrostatically-Driven Ultrasonic Resonators for Microfluidic Applications,” 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Myazaki, Japan, pp. 34-39, 01/2000
  275. T. Harpster, S. Hauvespre, M. Dokmeci, B. Stark, A. Vosoughi, and K. Najafi, “A Passive Humidity Monitoring System for In-Situ remote Wireless Testing of Micropackages,” 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Myazaki, Japan, pp. 335-340, 01/2000
  276. Y.T. Cheng, L. Lin, K. Najafi, “Fabrication and Hermeticity Testing of A Glass-Silicon Package Formed Using Localized Aluminum/Silicon-To-Glass Bonding,” 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Myazaki, Japan, pp. 757-762, 01/2000
  277. P. Mohseni, K. Nagarajan, B. Ziaie, K. Najafi, and S. B. Crary, “Robotics at the Interface of Microsystems Technology and Biology: Biobotics,” International Advanced Robotics Program’s Workshop on Micro Robots, Micro Machines and Systems, The Institute for Problems in Mechanics, Russian Academy of Sciences, Moscow, Russia, pp. 78-82, 11/1999
  278. A. Chandran, K. Najafi, K.D. Wise, “A New DC Baseline Stabilization Scheme for Neural Recording Microprobes,” First Joint BMES/EMBS Conference, Annual Fall Meeting of the Biomedical Engineering Society, 21st Annual International Conference of the Engineering in Medicine and Biology Society, Atlanta GA, pp. 386-387, 10/1999
  279. S. Hauvespre, M. Dokmeci, and K. Najafi, “Wireless Humidity Monitoring in Hermetic Biomedical Micropackages,” First Joint BMES/EMBS Conference, Annual Fall Meeting of the Biomedical Engineering Society, 21st Annual International Conference of the Engineering in Medicine and Biology Society, Atlanta GA, pp.487-488, 10/1999
  280. K. Najafi, B.A. Parviz, L.P. Bernal, P. Washabaugh, A.K. Chou, C. Zhang, M. Muller, and R. Moran, “Micromachined Resonators and Their Application in Micro Propulsion Systems,” 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, Ypsilanti MI, pp. 189-192, 09/1999
  281. D. Aslam, V. Papageorgiou, F. Ayazi, and K. Najafi, “IC-Compatible Technology of Poly-Diamond MEMS,” 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, Ypsilanti MI, pp. 113-116, 09/1999
  282. F. Ayazi, H.H. Chen, and K. Najafi, “High-Performance Vibratory Silicon Microgyroscope,” 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, Ypsilanti MI, pp. 153-158, 09/1999
  283. A. Salian, H. Kulah, N. Yazdi, and K. Najafi, “A Micro-g Capacitive Silicon Microaccelerometer,” 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, Ypsilanti MI, pp. 165-172, 09/1999
  284. M. Dokmeci, K. Najafi, “Glass-Silicon Hermetic Micro Packages for Implantable Biomedical Microsystems,” 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, Ypsilanti MI, pp. 159-164, 09/1999
  285. A. Naguib, D. Benson, H. Nagib, C. Huang, and K. Najafi, “Assessment of MEMS-Based Hot Wires,” 3rd ASME/JSME Joint Fluids Engineering Conference, San Francisco, CA, Proceedings of the, 07/1999
  286. F. Ayazi, and K. Najafi, “High Aspect-Ratio Polysilicon Micromachining Technology,” Tenth Int. Conf. Solid-State Sensors & Actuators (Transducers ’99), Sendai, Japan, pp. 320-323 (2A3.1), 06/1999
  287. R. Vogt, K. Najafi, Ralph Steiner, and H. Baltes, “A Low-Drift Differential Double Hall Sensor with On-Chip CMOS Circuitry,” Tenth Int. Conf. On Solid-State Sensors and Actuators (Transducers ’99), Sendai, Japan, pp. 172-175 (1D4.4), 06/1999
  288. Babak Amir Parviz, L. Bernal, and K. Najafi, “A Micromachined Helmholtz Resonator For Generation of Microjet Flows,” Tenth Int. Conf. On Solid-State Sensors and Actuators (Transducers ’99), Sendai, Japan, pp. 1788-1791, 06/1999
  289. B. Amir Parviz, and K. Najafi, “Fabrication of Bulk-Silicon Microstructures Using a Trench-Assisted Etch-Stop Process,” Tenth Int. Conf. On Solid-State Sensors and Actuators (Transducers ’99), Sendai, Japan, pp. 534-537, 06/1999
  290. A. Naguib, E. Soupos, H. Nagib, C. Huang, and K. Najafi, “A Piezoresistive MEMS Sensor for Acoustic Noise Measurements,” 5th AIAA/CEASAeroacoustic Conference and Exhibit,, Bellevue, WA, 05/1999
  291. J.A. Von Arx, and K. Najafi, “A Single-Chip Fully-Integrated Telemetry-Powered System For Peripheral Nerve Stimulation,” IEEE Int. Conf. On Solid-State Circuits (ISSCC ‘99), San Francisco CA, pp. 214-215, 02/1999
  292. N. Yazdi, and K. Najafi, “An Interface IC For Capacitive Silicon µg Accelerometers,” IEEE Int. Conf. On Solid-State Circuits (ISSCC ‘99), San Francisco CA, pp. 132-133, 02/1999
  293. M. Dokmeci, and K. Najafi, “A High Sensitivity Polyimide Humidity Sensor For Monitoring Hermetic Micropackages,” IEEE Micro Electro Mechanical Systems (MEMS) Conference, Orlando, Florida, pp. 279-284, 01/1999
  294. N. Yazdi, A. Salian, and K. Najafi, “A High-Sensitivity Capacitive Microaccelerometer With a Folded-Electrode Structure,” IEEE Micro Electro Mechanical Systems (MEMS) Conference, Orlando, Florida, pp. 600-605, 01/1999
  295. Y.T. Cheng, L. Lin, and K. Najafi, “Localized Bonding with PSG or Indium Solder as Intermediate Layer,” IEEE Micro Electro Mechanical Systems (MEMS) Conference, Orlando FL, pp. 285-289, 01/1999
  296. N. Yazdi, K. Najafi, “Modeling and Noise Analysis of A Silicon Micro-g Accelerometer with Direct Digital Output,” The 2nd International Conference on Integrated Nano/Microtechnology for Space Applications (NanoSpace98), Houston, TX, 11/1998
  297. C. Huang, and K. Najafi, “Ultra-Thin p++ Monocrystalline Silicon Microstructures,” Solid-State Sensor and Actuator Workshop, Hilton-Head, S.C., pp. 241-244, 06/1998
  298. B. Ziaie, T.W. Wu, N. Kocaman, K. Najafi, and D.J. Anderson, “An Implantable Pressure Sensor Cuff For Tonometric Blood Pressure Measurement,” Solid-State Sensor and Actuator Workshop, Hilton-Head, S.C., pp. 216-219, 06/1998
  299. Y.T. Cheng, L. Lin, and K. Najafi, “Localized Silicon Fusion and Eutectic Bonding for MEMS Fabrication and Packaging,” Solid-State Sensor and Actuator Workshop, Hilton-Head, S.C., pp. 233-236, 06/1998
  300. F. Ayazi and K. Najafi, “Design and fabrication of a high-performance polysilicon vibrating ring gyroscope,” IEEE Micro Electro Mechanical Systems Workshop (MEMS’98), Heidelberg, Germany, pp. 621-626, 01/1998
  301. Y. Gianchandani, H. Kim, M Shinn, B. Ha, B. Lee, K. Najafi, and C. Song, “A MEMS-First Fabrication Process for Integrating CMOS Circuits with Polysilicon Microstructures,” Eleventh IEEE International Workshop on Micro Electro Mechanical Systems (MEMS), Heidelberg, Germany, pp. 257-262, 01/1998
  302. C. Huang, K. Najafi, E. Alnajjar, C. Christophorou, A. Naguib, and H.M. Nagib , “Operation and Testing of Electrostatic Microactuators and Micromachined Sound Detectors for Active Control of High Speed Flows,” IEEE/ASME Micro Electro Mechanical Systems Workshop, Heidelberg, Germany, pp. 81-86, 01/1998
  303. A. Naguib, C. Christophorou, E. Alnajjar, H. Nagib, C.C. Huang, and K. Najafi, “Arrays of MEMS-Based Actuators for Control of Supersonic Jet Screech,” Meeting of the American Institute of Aeronautics and Astronautics, Paper AIAA 97-1963, 07/1997
  304. N. Yazdi, and K. Najafi, “An All-Silicon Single-Wafer Fabrication Technology for Precision Microaccelerometers,” Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, Vol. 2, pp. 1181-1184 (4B1.04), 06/1997
  305. C. Yeh, and K. Najafi, “Micromachined Tunneling Accelerometer with a Low-Voltage CMOS Interface Circuit,” Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, Vol. 2, pp. 1213-1216 (4B2.08P), 06/1997
  306. J. Von Arx, and K. Najafi, “On-Chip Coils with Integrated Cores for Remote Inductive Powering of Integrated Microsystems,” Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, Vol. 2, pp. 999-1002 (3D1.03), 06/1997
  307. M. Dokmeci, J. Von Arx, and K. Najafi, “Accelerated Testing of Anodically Bonded Glass-Silicon Packages in Salt Water,” Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, Vol. 1, pp. 283-286 (1D4.08P), 06/1997
  308. B. Ziaie, N. Kocaman, and K. Najafi, “A Generic Micromachined Silicon Platform for Low-Power, Low-Loss Miniature Transceivers,” Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago,, Vol. 1, pp. 257-260 (1D4.01), 06/1997
  309. Y. Gianchandani, M. Shinn, K. Najafi, “Impact of Long, High Temperature Anneals on Residual Stress in Polysilicon,” Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago,, Vol. 1, pp. 623-624 (2D1.09PL), 06/1997
  310. S. Wang, S.B. Crary, K. Najafi, “Electronic Determination of the Modulus of Elasticity and Intrinsic Stress of Thin Films Using Capacitive Bridges,” Proceedings, Symposium of the Materials Research Society (MRS), San Francisco CA, Vol. 276, pp. 203-208, 04/1997
  311. B. Ziaie, K. Najafi, and D. J. Anderson , “A Low-Power Miniature Transmitter Using a Low-Loss Silicon Platform for Biotelemetry,” 19th Ann. International IEEE Engineering in Medicine and Biology Conference, Chicago,, 4 pages, 01/1997
  312. E. Alnajjar, H. Nagib, A. Naguib, C. Christophorou, C. Huang, and K. Najafi, “Receptivity of High-Speed Jets to Excitation Using an Array of MEMS-Based Mechanical Actuators,” ASME, FEDSM’97, 01/1997
  313. A. Selvakumar, F. Ayazi, and K. Najafi, “A High-Sensitivity Z-Axis Silicon Accelerometer,” IEEE Int. Electron Devices Meeting, San Francisco, 12/1996
  314. E. Alnajjar, A. Naguib, H. Nagib, C.C. Huang, K. Najafi, “Receptivity of the Shear Layer of an Axi-Symmetric Jet to Excitation Using MEMS-Based Mechanical Actuators,” Meeting of the Division of Fluid Dynamics, New York, 11/1996
  315. K. Najafi, “Silicon Micromachining Technologies: Future Needs and Challenges,” Micromaching & Microfabrication Process Technology II Conference, SPIE, 10/1996
  316. B. Ziaie, J. Von Arx, K. Najafi, “A Micro-Fabricated Planar High-Current IrOx Stimulating Microelectrode,” IEEE Eng. in Medicine and Biology (EMBS) Conf., Amsterdam, 10/1996
  317. N. Yazdi, A. Mason, K. Najafi, K.D. Wise, “A Low-Power Generic Interface Circuit for Capacitive Sensors,” Solid-State Sensor and Actuator Workshop, Hilton Head, SC, pp. 215-218, 06/1996
  318. N. Yazdi, A. Mason, K. Najafi, and K.D. Wise, “A Smart Sensing Microsystem with a Capacitive Sensor Interface,” IEEE Int. Conf. on Circuits and Systems, Atlanta, Georgia, Vol. 4, pp. 336-339, 05/1996
  319. A. Selvakumar, N. Yazdi, and K. Najafi, “A Low-Power Wide Range Threshold Acceleration Sensing System,” Micro Electromechanical Systems Workshop (MEMS ‘96), San Diego, California, pp. 186-191, 02/1996
  320. T. Akin, B. Ziaie, and K. Najafi, “A Modular, Micromachined High-Density Connector for Implantable Biomedical Systems,” Micro Electromechanical Systems Workshop (MEMS ‘96), San Diego, California, pp. 497-502, 02/1996
  321. C. Huang, J. Papp, K. Najafi, and H.M. Nagib, “A Microactuator System for the Study and Control of Screech in High-Speed Jets,” Micro Electromechanical Systems Workshop (MEMS ‘96), San Diego, California, pp. 19-24, 02/1996
  322. B. Ziaie and K. Najafi, “Biomedical Microdevices: A Micromachining Approach,” International Semiconductor Device Research Symposium, Charlottesville, VA, pp. 401-404, 12/1995
  323. C. Yeh, and K. Najafi, “A Low-Voltage Bulk Silicon Tunneling-Based Microaccelerometer,” Int. Electron Devices Meeting (IEDM ‘95), Washington D.C., pp. 593-596, 12/1995
  324. K. Najafi, “Recent Progress in Micromachining Technology and Applications in Implantable Biomedical Systems,” Sixth Int. Symp. on Micro Machine and Human Science, MHS ‘95, Nagoya, Japan, pp. 11-20, 10/1995
  325. K. Najafi, “Microinstrumentation Systems for Environmental Monitoring,” nt. Symp. on Micro Systems, Intelligent Materials and Robots, Sendai, Japan, pp. 142-145, 09/1995
  326. K.D. Wise, C.H. Mastrangelo, K. Najafi, and Clark T.C. Nguyen, “Research in Integrated Sensors and Microsystems at the University of Michigan,” Sensors Expo, Chicago, IL, Digest, 09/1995
  327. M. Nardin, and K. Najafi, “A Multichannel Neuromuscular Microstimulator With Bi-Directional Telemetry,” Int. Conference on Solid-State Sensors and Actuators, Transducers ’95, Stockholm, Sweden, Vol. 1, pp. 59-62 (7-A1), 06/1995
  328. J. Von Arx, B. Ziaie, M. Dokmeci, And K. Najafi, “Hermeticity Testing of Glass-Silicon Packages with On-Chip Feedthroughs,” Int. Conference on Solid-State Sensors and Actuators, Transducers ’95, Stockholm, Sweden, Vol. 1, pp. 244-247 (54-A6), 06/1995
  329. A. Mason, N. Yazdi, K. Najafi, and K.D. Wise, ” Low-Power Wireless Microinstrumentation System for Environmental Monitoring,” Int. Conference on Solid-State Sensors and Actuators, Transducers ’95, Stockholm, Sweden, Vol. 1, pp. 107-110 (19-A3), 06/1995
  330. Y.B. Gianchandani, K.J. Ma, and K. Najafi, “A CMOS Dissolved Wafer Process for Integrated p++ Microelectromechanical Systems,” Int. Conference on Solid-State Sensors and Actuators, Transducers ’95, Stockholm, Sweden, Vol. 1, pp. 79-82 (12-A2), 06/1995
  331. T. Akin, K. Najafi, and R.M. Bradley, “An Implantable Multichannel Digital Neural Recording System for a Micromachined Sieve Electrode,” Int. Conference on Solid-State Sensors and Actuators, Transducers ’95, Stockholm, Sweden, Vol. 1, pp. 51-54 (5-A1), 06/1995
  332. K. Najafi, “Silicon-Based Electronic Interfaces to Biological Systems,” 1995 IEEE Int. Conference on Robotics and Automation, Nagoya, Japan, 05/1995
  333. R.M. Bradley, T. Akin, S. Gurkan, X. Cao, and K. Najafi, “Chronic Recordings from Fibers of Rat Glossopharyngeal Nerve Regenerated Through a Micromachined Sieve Electrode Array,” 17th annual meeting of the Association for Chemoreception Sciences, Sarasota FL, pp. 231, 04/1995
  334. M. Nardin, B. Ziaie, J. Von Arx, A. Coghlan, M. Dokmeci, and K. Najafi, “An Inductively Powered Microstimulator for Functional Neuromuscular Stimulation,” 13th International Symposium on Biotelemetry, Williamsburg, VA, pp. 99-104, 04/1995
  335. A. Selvakumar, K. Najafi, W.H. Juan, and S. Pang, “Vertical Comb Array Microactuators,” EEE Micro Electro Mechanical Systems (MEMS) Workshop, Amsterdam, Netherlands, pp. 43-48, 02/1995
  336. K. Najafi, “Sensor/Circuit Integration in Biomedical Applications,” European NEXUS Workshop on Sensor/Circuit Integration, Toulouse, France, 09/1994
  337. K. Najafi, “Integrated Sensing Systems in Closed Loop Neural Prosthesis,” European Solid-State Sensors and Actuators Conf., EUROSENSORS, Toulouse, France, pp. 5, 09/1994
  338. Y.B. Gianchandani, and K. Najafi, “Bulk Silicon Micromachining for the Scanning Thermal Profiler and Other Applications,” Int. Symposium on Optics, Imaging, and Instrumentation, SPIE, San Diego, CA, Digest, 07/1994
  339. W.H. Juan, S.W. Pang, A. Selvakumar, and K. Najafi, “Using Electron Cyclotron Resonance (ECR) Source to Etch Polyimide Molds for Fabrication of Electroplated Microstructures,” Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 82-85, 06/1994
  340. C.W. Yeh, and K. Najafi, “Bulk-Silicon Tunneling-Based Pressure Sensors,” Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 201-204, 06/1994
  341. Y.B. Gianchandani, and K. Najafi, “A Compact Strain Sensor with a Bent Beam Deformation Multiplier and a Complementary Motion Vernier,” Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 116-119, 06/1994
  342. K.J. Ma, N. Yazdi, and K. Najafi, “A Bulk-Silicon Capacitive Microaccelerometer with Built-In Overrange and Force Feedback Electrodes,” Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 160-163, 06/1994
  343. A. Selvakumar, and K. Najafi, “High Density Vertical Comb Array Microactuators Fabricated Using A Novel Bulk/Poly-Silicon Trench Refill Technology,” Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 138-141, 06/1994
  344. M.W. Putty, and K. Najafi, “A Micromachined Vibrating Ring Gyroscope,” Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 213-220, 06/1994
  345. T. Akin, K. Najafi, “A Telemetrically Powered and Controlled Implantable Neural Recording System with CMOS Interface Circuitry,” IEEE 7th Mediterranean Electrotechnical Conf., Antalya, Turkey, pp. 545-548, 04/1994
  346. K. Ma, and K. Najafi, “A New Capacitive Electrochemical Etch-Stop Technique,” IEEE/ASME Micro Electro Mechanical Systems, Oiso, Japan, pp. 158-163, 01/1994
  347. T. Akin, K. Najafi, R. Bradley, “A LowPower Implantable Multichannel Digital Neural Record System,” VLSI Symposium, Hawaii, Proceedings, 01/1994
  348. Y. Gianchandani, and K. Najafi, “Silicon Micromachined Thermal Profilers,” Int. Electron Devices Meeting, IEDM ’93, Washington, DC, pp. 191-194, 12/1993
  349. K. Najafi, and C.H. Mastrangelo, “Solid-State Microsensors and Smart Structures,” IEEE Ultrasonics, Ferroelectrics, and Frequency Control Symposium, Baltimore, Maryland, Proceedings, 11/1993
  350. A.D. Oliver, W.G. Baer, K. Najafi, and K.D. Wise, “Precision Measurement of Process Temperature Uniformity in Semiconductor Manufacturing,” SRC TECHCON ’93, Proceedings, 10/1993
  351. B. Ziaie, J. Von Arx, M. Nardin, and K. Najafi, “A Hermetic Packaging Technology with Multiple Feedthrough For Integrated Sensors and Actuators,” 7th Int. Conference on Solid-State Sensors and Actuators (Transducers ’93), Yokohama, Japan, pp. 450-453, 06/1993
  352. B. Ziaie, M. Nardin, J. Von Arx, and K. Najafi, “A Single Channel Implantable Microstimulator for Functional Neuromuscular Stimulation (FNS),” 7th Int. Conference on Solid-State Sensors and Actuators (Transducers ’93), Yokohama, Japan, pp. 266-269, 06/1993
  353. K. Najafi, “Solid-State Integrated Microsensors,” 124th Meeting of the Acoustical Society of America, New Orleans, LA, 10/1992
  354. S. Bouwstra, H.A.C. Tilmans, A. Selvakumar, and K. Najafi, “Base-Driven Micromechanical Resonators,” Eurosensors VI, San Sebastian, Spain, pp. 65, 10/1992
  355. K. Najafi, “Silicon Integrated Microsensors,” International Society for Optical Engineering (SPIE) Symposium, OE/FIBERS ’92, Boston, MA, OE/FIBERS 92, 09/1992
  356. S. Bouwstra, H.A.C. Tilmans, A. Selvakumar, and K. Najafi, “Base-Driven Micromechanical Resonators,” Digest, IEEE Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 148-152, 06/1992
  357. Y. Gianchandani, K. Najafi, “Micron-Sized High Aspect Ratio Bulk Silicon Micromechanical Devices,” Proceedings, IEEE Micro Electro Mechanical Systems Workshop, Travermude, Germany, pp. 208-213, 02/1992
  358. Y. Gianchandani, K. Najafi, “Batch Fabrication and Assembly of Micromotor-Driven Mechanisms With Multi-Level Linkages,” Proceedings, IEEE Micro Electro Mechanical Systems Workshop, Travermude, Germany, pp. 141-146, 02/1992
  359. Y. Gianchandani, K. Najafi, “A Bulk Silicon Dissolved Wafer Process for Microelectromechanical Systems,” Technical Digest, Int. Electron Devices Meeting, Washington DC, pp. 757-760, 12/1991
  360. T. Akin, K. Najafi , “A Micromachined Silicon Sieve Electrode for Nerve Regeneration Applications,” 6th Int. Conf. on Solid-State Sensors and Actuators, San Francisco, CA, pp. 128-131, 06/1991
  361. B. Ziaie, Y. Gianchandani, K. Najafi, “A High-Current Thin-Film Neuromuscular Microstimulator,” 6th Int. Conf. on Solid-State Sensors and Actuators, San Francisco, CA, pp. 124-127, 06/1991
  362. W.G. Baer, T. Hull, K.D. Wise, K. Najafi, K.D. Wise, “A Multiplexed Silicon Infrared Thermal Imager,” 6th Int. Conf. on Solid-State Sensors and Actuators, San Francisco, CA, pp. 631-634, 06/1991
  363. J.F. Hetke, K. Najafi, K.D. Wise, “Flexible Silicon Interconnects for Microelectromechanical Systems,” 6th Int. Conf. on Solid-State Sensors and Actuators, San Francisco, CA, pp. 764-767, 06/1991
  364. J. Ji, S.T. Cho, Y. Zhang, K. Najafi, K.D. Wise, “An Ultraminiature CMOS Pressure Sensor For a Multiplexed Cardiovascular Catheter,” 6th Int. Conf. on Solid-State Sensors and Actuators, San Francisco, CA, pp. 1018-1021, 06/1991
  365. K.D. Wise, K. Najafi, J. Ji, J.F. Hetke, S.T. Tanghe, A. Hoogerwerf, D.J. Anderson, S.L. BeMent, M. Ghazzi, W. Baer, T. Hull, Y. Yang, “Micromachined Silicon Microprobes for CNS Recording and Stimulation,” IEEE Eng. in Medicine and Biol. Soc. Conf., Philadelphia, PA, Digest, 11/1990
  366. T. Akin, B. Ziaie, K. Najafi, “RF Telemetry Powering and Control of Hermetically-Sealed Integrated Sensors and Actuators,” IEEE Solid-State Sensor and Actuator Workshop, Hilton-Head, SC, pp. 145-148, 06/1990
  367. S.T. Cho, K. Najafi, K.D. Wise, “Secondary Sensitivities and Stability of Ultrasensitive Pressure Sensors,” IEEE Solid-State Sensor and Actuator Workshop, Hilton-Head, SC, pp. 184-187, 06/1990
  368. S.T. Cho, K. Najafi, K.D. Wise, “Scaling and Dielectric Stress Compensation of Ultrasensitive Boron-Doped Silicon Microstructures,” IEEE Workshop on Micro Electromechanical Systems, Napa Valley, CA, pp. 50-55, 02/1990
  369. S.T. Cho, K. Najafi, K.D. Wise, “An Ultrasensitive Silicon Pressure-Based Flowmeter,” International Electron Device Meeting, Washington, pp. 499-502, 12/1989
  370. J.F. Hetke, K. Najafi, K.D. Wise, “Flexible Miniature Ribbon Cables for Long-Term Connection to Implantable Sensors,” 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers ’89, Montreux, Switzerland, pp. 277-278, 06/1989
  371. S.J. Tanghe, K. Najafi, K.D. Wise, “A Planar IrO Multichannel Stimulating Electrode for Use in Neural Prosthesis,” 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers ’89, Montreux, Switzerland, pp. 297-298, 06/1989
  372. J. Ji, K. Najafi, K.D. Wise, “A Scaled Electronically-Configurable Multichannel Recording Array,” 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers ’89, Montreux, Switzerland, pp. 195-196, 06/1989
  373. K. Suzuki, K. Najafi, K.D. Wise, “Process Alternatives and Scaling Limits for High-Density Silicon Tactile Imagers,” 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers ’89, Montreux, Switzerland, pp. 260-262, 06/1989
  374. K. Najafi, “Integrated Sensors in Biological Environments,” 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers ’89, Montreux, Switzerland, pp. 295-296, 06/1989
  375. K. Najafi, K. Suzuki, “A Novel Technique and Structure for the Measurement of Intrinsic Stress and Young’s Modulus of Thin Films,” IEEE Workshop on Micro Electromechanical Systems, Salt Lake City, UT, pp. 96-97, 02/1989
  376. K. Suzuki, K. Najafi, K.D. Wise, “A 1024-Element High-Performance Silicon Tactile Imager,” Int. Electron Device Meeting (IEDM) San Francisco CA, pp. 674-677, 12/1988
  377. K.D. Wise, N. Najafi, C.L. Johnson, J. Cowles, S. Cho, K. Najafi, “An Integrated VLSI Sensor for Semiconductor Process Control,” TECHCON ’88, Dallas, TX, pp. 345-348, 10/1988
  378. K. Najafi, “Implantable Sensors,” Symposium for Innovation in Measurement Science, Instrument Society of America, Geneva NY, 08/1988
  379. N. Najafi, K.W. Clayton, W.G. Baer, K. Najafi, K.D. Wise, “An Architecture and Interface for VLSI Sensors,” Solid-State Sensor and Actuator Workshop, Hilton Head, SC, pp. 76-79, 06/1988
  380. K. Najafi, J. Ji, K.D. Wise, “Multichannel Intracortical Recording Microprobes: Scaling Limitations, Device Characteristics, and Circuit Encapsulation,” 4th Int. Conf. on Solid-State Sensors and Actuators, Transducers ’87, Japan, pp. 65-68, 06/1987
  381. K. Najafi, “Sensor-System Interface: The Influence of On-Chip Electronics,” Int. Symp. Circuits and Systems, Philadelphia, PA, pp. 233-236, 05/1987
  382. K. Najafi, “Silicon Micromachining: Key to Silicon Integrated Sensors,” Proc. of Symp. on Sensors and Technology, Cleveland, Vol. 87-15, pp. 152-164, 04/1987
  383. S.L. BeMent, K.L. Drake, D.J. Anderson, K.D. Wise, K. Najafi, “Semiconductor Microprobes- Recording/Biocompatibility Properties,” IEEE/EMBS Eighth Annual Conference, Dallas, Texas, pp. 1622-1625,, 11/1986
  384. K. Najafi, K.D. Wise, “An Implantable Multielectrode Array with On-Chip Signal Processing,” Int. Solid-State Ckts. Conf., pp. 98-99, 02/1986
  385. S.L. BeMent, D.J. Anderson, K.D. Wise, K.L. Drake, K. Najafi, L. Xue, “Silicon Multielectrode Impedance, Geometry, and Neural Cell Recording Ability,” IEEE/Seventh Annual Conf. Eng. Medicine and Biology Society, pp. 159-162, 09/1985
  386. K.D. Wise, K. Najafi, K.L. Drake, “A Multichannel Intracortical Microprobe for Single-Unit Recording,” IEEE/NSF Biosensors Conference, Los Angeles, CA, pp. 87-89, 09/1984
  387. K.D. Wise, K. Najafi, “A Micromachined Integrated Sensor with On-Chip Self-Test Capability,” Solid-State Sensors Conference, Hilton Head, SC, pp. 12-16, 06/1984

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Other Publications

  1. K. Najafi, “MEMS Inertial Microsystems, A Historical and Technical Perspective,” Invited Tutorial, IEEE Int. Symposium on Inertial Sensors, Laguna Beach, February 2016
  2. K. Najafi, “Micromachined Angular Rate Sensors and Gyroscopes: A historical and Technical Perspective,” WIMS Industrial Advisory Board Meeting, October 2015
  3. S.W. Yoon, S. Lee, N.C. Perkins, K. Najafi, “Novel Shock Protection Technologies for MEMS using Nonlinear Springs,” 10th Korean MEMS Conference, Jeju island, Korea, pp. 135-136, 04/2008
  4. K. Najafi, “Packaging of Implantable Microsystems,” IEEE Int. Sensors Conference, Atlanta GA, 10/2007
  5. K. Najafi, “Wireless Integrated Microsystems for Environmental Monitoring and Implantable Prostheses,” Canadian Workshop on MEMS, Montreal, Canada, 08/2007
  6. K. Najafi, “Micromachined Gas Chromatography Microsystem for Complex Gas Analysis,” DARPA Microsystems Technologies Office Symposium, San Jose CA, 03/2007
  7. K. Najafi, “Packaging of Implantable Microsystems,” IEEE Int. Sensors Conference, Atlanta GA, 10/2006
  8. P. Mohseni, and K. Najafi, “Single-Chip Wireless Microsystems for Multichannel Neural Biopotential Recording,” NIH-NINDS Neural Prosthesis Workshop, Bethesda MD, 10/2006
  9. E. T. Zellers, W. H. Steinecker, G. R. Lambertus, M. Agah, C.-J. Lu, H. K. L. Chan, J. A. Potkay, M.C. Oborny, J. M. Nichols, A. Astle, H. S. Kim, M. P. Rowe, J. Kim, L. W. da Silva, J. Zheng, J. J. Whiting, R. D. Sacks, S. W. Pang, M. Kaviany, P. L. Bergstrom, A. J. Matzger, Ç. Kurdak, L. P. Bernal, K. Najafi, K. D. Wise, “A Versatile MEMS Gas Chromatograph For Determinations Of Environmental Vapor Mixtures,” Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island SC, 06/2004
  10. K. D. Wise, K. Najafi, R. Sacks, and E. T. Zellers, “A Wireless Integrated Microsystem for Environmental Monitoring,” IEEE Int. Solid-State Circuits Conference, San Francisco CA, pp. 434-435, 02/2004
  11. K. Najafi, J. Chae, H. Kulah and G. He, “Micromachined Silicon Accelerometers And Gyroscopes,” IROS – IEEE International Robotics and Systems Conference, Las Vegas NV, 10/2003
  12. P. Mohseni and K. Najafi, “Bi-directional wireless microsystems for biomedical in vivo recording applications,” SIGDA Ph.D. Forum at 40th Design Automation Conf. (DAC’03), Anaheim CA, 06/2003
  13. K. Najafi, “Micropackaging Technologies for Integrated Microsystems: Applications to MEMS and MOEMS,” PIE’s Micromachining and Microfabrication Symposium, San Jose CA, pp. 1-19, 01/2003
  14. K. Wise and K. Najafi, “Fully-Implantable Auditory Prostheses: Restoring Hearing to the Profoundly Deaf,” IEEE International Electron Devices Meeting (IEDM), San Francisco CA, pp. 499-502, 12/2002
  15. K. Najafi, “Power and Integrated Microsystems,” SPIE International Symposium on Design, Test, Integration, and Packaging of MEMS and MOEMS, Cannes, France, 05/2002
  16. Y. Shimatani, S.A. Nikles, K. Najafi, and R.M. Bradley, “Simultaneous chronic recording from multiple single fibers of the chorda tympani nerve using an implantable sieve electrode array,” Presented at the XXIV annual meeting of the Association for Chemoreception Sciences, Sarasota FL, 01/2002
  17. K. Najafi, “MEMS and Microsystems,” International Semiconductor Device Research Symposium, Washington DC, 12/2001
  18. M. O. Muller, L.P. Bernal, T.-K. A. Chou, K. Najafi, and P. D. Washabaugh, “On Propulsion Efficiency And Vortical Structure Of Synthetic Jet Flows,” APS Division Of Fluid Dynamics 54th Annual Meeting, San Diego CA, 11/2001
  19. K. Najafi, “Research in Wireless Integrated Micro Systems (WIMS) at University of Michigan,” Sensors Expo, Detroit MI, 09/2000
  20. K. Najafi, “Integrated Biomedical Microsystems,” World Congress on Medical Physics and Biomedical Engineering, Nice, France, 09/1997
  21. K. Najafi, “Silicon Micromachining Technologies: Future Needs and Challenges,” SPIE, Micromachining & Microfabrication Process Technology II Conference, 10/1996
  22. B. Ziaie and K. Najafi, “Biomedical Microdevices: A Micromachining Approach,” 1995 International Semiconductor Device Research Symposium, Charlottesville VA, pp. 401-404, 12/1995
  23. K. Najafi, “Microinstrumentation Cluster for Environmental Sensing,” GE MEMS and Advanced Packaging Workshop, Schenectady NY, 11/1995
  24. K. Najafi, “MEMS Research Activities at the University of Michigan,” IEEJ Seminar on MEMS, MST, and Micromachines, University of Tokyo, Tokyo, Japan, 10/1995
  25. K. Najafi, “Research in Integrated Sensors and Microsystems at the University of Michigan,” Technical Digest of the IEEJ Seminar on MEMS, MST and Micromachines, Tpkyo, Japan, 10/1995
  26. K. Najafi, “Recent Progress in Micromachining Technology and Applications in Implantable Biomedical Systems,” Sixth Int. Symp. on Micro Machine and Human Science, MHS ‘95, Nagoya, Japan, pp. 11-20, 10/1995
  27. K. Najafi, “Microinstrumentation Systems for Environmental Monitoring,” Int. Symp. on Micro Systems, Intelligent Materials and Robots, Sendai, Japan, pp. 142-145, 09/1995
  28. K.D. Wise, C.H. Mastrangelo, K. Najafi, and Clark T.C. Nguyen, “Research in Integrated Sensors and Microsystems at the University of Michigan,” Sensors Expo, Chicago IL, 09/1995
  29. K. Najafi, “Silicon-Based Electronic Interfaces to Biological Systems,” Workshop on “Bio-Mechatronics” held as part of the 1995 IEEE Int. Conference on Robotics and Automation, Nagoya, Japan, 05/1995
  30. K. Najafi, “Sensor/Circuit Integration in Biomedical Applications,” European NEXUS Workshop on Sensor/Circuit Integration, Toulouse, France, 09/1994
  31. K. Najafi, “Integrated Sensing Systems in Closed Loop Neural Prosthesis,” European Solid-State Sensors and Actuators Conf., EUROSENSORS, Toulouse, France, 09/1994
  32. M.W. Putty, and K. Najafi, “A Micromachined Vibrating Ring Gyroscope,” Solid-State Sensors and Actuators Workshop, Hilton Head Island SC, pp. 213-220, 06/1994
  33. K. Najafi, and C.H. Mastrangelo, “Solid-State Microsensors and Smart Structures,” IEEE Ultrasonics, Ferroelectrics, and Frequency Control Symposium, Baltimore MD, 11/1993
  34. K. Najafi, “Solid-State Integrated Microsensors,” 124th Meeting of the Acoustical Society of America, New Orleans LA, 10/1992
  35. K. Najafi, “Silicon Integrated Microsensors,” International Society for Optical Engineering (SPIE) Symposium, OE/FIBERS ’92, Boston MA, 09/1992
  36. K. Najafi, “A Review of Solid-State Integrated Microsensors and Their Future Application in Space Systems,” NASA SATWG Sensors and Software Workshop, New Orleans LA, 06/1992
  37. K. Najafi, “Packaging and Interconnect Technologies for Solid-State Microsensors,” 181st Meeting of the Electrochemical Society, St. Louis MO, 05/1992
  38. K. Najafi, “Integrated Sensors and Microsystems: Communication Links to a Non-Electronic World,” Eastern Communications Forum, an Educational Meeting Conducted by the National Engineering Consortium, Rye NY, 05/1992
  39. K. Najafi, “Present Advances and Future Needs in Integrated Sensors and Microsystems,” National Materials Advisory Board (of the National Research Council) Workshop on Microengineering, Washington DC, 04/1992
  40. R.M. Bradley, R.H. Smoke, T.A. Akin, K. Najafi, “Functional Regeneration of Glossopharyngeal Nerve Through Micromachined Sieve Electrodes,” The 14th Annual meeting of the Association for Chemoreception Sciences (AChemS XIV), Sarasota FL, 04/1992
  41. K. Najafi, “Solid-State Integrated Sensors, Fundamentals and Applications,” Symposium on Electrochemical Science and Technology of the Michigan Chapter of the Electrochemical Society, Warren MI, 05/1991
  42. R.M. Bradley, S. Gurkan, B.E. Bradley, K. Najafi, “Regeneration of Rat Glossopharyngeal Nerve Through Sieve Electrodes,” The 13th Annual meeting of the Association for Chemoreception Sciences (AChemS XIII), Sarasota FL, 04/1991
  43. J.F. Hetke, D.J. Anderson, J.A. Wiler, K. Najafi, K.D. Wise, “An Implantable Multichannel Silicon-Substrate Array for Chronic Stimulation of the Central Nervous System,” Midwinter Meeting, Association for Research in Otolaryngology, St. Petersburg FL, 02/1991
  44. K. Najafi, “Solid-State Sensor and Actuator Research at the University of Michigan,” Meeting of the Michigan Chapter of the American Vacuum Society, Ann Arbor MI, 02/1991
  45. K. Najafi, “A Dissolved-Wafer Silicon-On-Insulator Technology and Its Applications to Integrated Sensors and Actuators,” ASME Design Engineering Show and Conference, Anaheim CA, 09/1990
  46. K.D. Wise, K. Najafi, and W.G. Baer,, “A Silicon Thermopile-Based Sensor for Non-Contact Thermal Imaging in Industrial process Control,” Temperature Measurement Workshop, Sante Fe CA, 02/1990
  47. K. Najafi, “Integrated Sensors in Biological Environments,” 5th Int. Conf. on Solid-State Sensors and Actuators (Transducers ’89), Montreux, Switzerland, pp. 295-296, 06/1989
  48. J.F. Hetke, D.J. Anderson, D.A. Evans, J.A. Wiler, K. Najafi, R.A. Altschuler, “Tissue Volume Selectivity in the Cochlear Nucleus to Electrical Stimulation with Multichannel Silicon Substrate Arrays,” Association for Res. in Otolaryngology, Midwinter Meeting, Florida, 02/1989
  49. K. Najafi, “Fabrication of Microstructures and Integrated Sensors Using a Dissolved-Wafer Silicon-On-Insulator Process,” General Motors Research Labs Solid-State Sensor Workshop, Warren MI, 02/1989
  50. K. Najafi, “Control and Measurement with Integrated Solid-State Sensors,” Fourth Regional Symp., Int. Society for Hybrid Microelectronics, Dallas TX, 04/1988
  51. K. Najafi, K.D. Wise, “An Integrated Multielectrode Microprobe for Intracortical Recording,” Invited Talk, BMES 1985 Annual Meeting, Los Angeles, 01/1988
  52. K. Najafi, “Organic and Inorganic Coatings for Protection of Integrated Circuit Electrodes,” 18th Annual Neural Prosthesis Workshop, National Institutes of Health, Bethesda MD, 10/1987
  53. K. Najafi, “Solid-State Integrated Sensors and Their Application in Instrumentation and Measurement Systems,” Symposium for Innovation in Measurement Science, Instrument Society of America, Geneva, NY, 08/1987
  54. K. Najafi, “Silicon Micromachining: Key to Silicon Integrated Sensors,” Symposium on Sensors and Technology, Case Western Reserve University, Cleveland OH, 04/1987
  55. K. Najafi, K.D. Wise, “An Integrated Multielectrode Microprobe for Intracortical Recording,” BMES 1985 Annual Meeting, Los Angeles CA, 04/1985
  56. K.D. Wise, K. Najafi, “A Micromachined Integrated Sensor with On-Chip Self-Test Capability,” Solid-State Sensors Conf, Hilton Head Island SC, pp. 12-16, 06/1984

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Book Chapters

  1. H. Kim, K. Najafi, and L.P. Bernal, “Gas Micropumps,” chapter in Comprehensive Microsystems, edited by Y. Gianchandani, Hans Zappe, and O. Tabata, Elsevier Publishers, 01/2008
  2. K. Najafi, T.J. Harpster, H. Kim, J.S. Mitchell, W.C. Welch III, “Wafer Bonding Using Parylene and Wafer-Level Transfer of Free-Standing Parylene Membranes,” chapter in Comprehensive Microsystems, edited by Y. Gianchandani, Hans Zappe, and O. Tabata, Elsevier Publishers, 01/2008
  3. M. Ghovanloo, K.D. Wise, and K. Najafi, “Towards a button-sized 1024-site wireless cortical microstimulating array,” euro-Nano Technology, Artificial Implants, and Neural Prostheses, Book of the1st Intl. IEEE/EMBS Conf. on Neural Engineering, Ed. M. Akay, Ch. 23, Hoboken: John Wiley & Sons, Inc., 01/2007
  4. G. K. Fedder, J. Chae, H. Kulah, K. Najafi, T. Denison, J. Kuang, and S. Lewis, “Monolithically Integrated Inertial Sensors,” Chapter in “CMOS MEMS,” Edited by H. Baltes, O. Brand, G.K. Fedder, C. Hierold, J.G. Korvink, and O. Tabata, Volume 2 of a series of books entitled “Advanced Micro- and Nanosystems,”, Wiley-VCH, 01/2005
  5. K. Najafi, “Micromachined Systems For Neurophysiological Applications,” Handbook of Microlithography, Micromachining and Microfabrication, Volume II: Micromachining and Microfabrication, SPIE, 01/1997
  6. K. Najafi, “Sensor and Circuit Integration in Biomedical Applications,” Silicon Sensors and Circuits: On-Chip Compatibility, Ed. R.F. Wolffenbuttel, Chapman and Hall, pp. 211-257, 01/1996
  7. K. Najafi, K.D. Wise, N. Najafi, “Integrated Sensors,” Semiconductor Sensors, Edited by Simon Sze, John Wiley, 01/1994
  8. D.J. Anderson, K.D. Wise, and K. Najafi, “Micromachined Silicon Substrate Electrodes for Extracellular Recording,” EEE Engineering in Medicine and Biology Conference, Paris, France, 10/1992
  9. K.D. Wise, K. Najafi, “VLSI Sensors in Medicine,” Norman G. Einspruch and Robert D. Gold, eds., Academic Press, 01/1988

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